Fabrication and evaluation of flexible Mach-Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam

Fabrication and evaluation of flexible Mach-Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam

A flexible Mach-Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton microbeam was used to fabricate a 40 × 20 mm2 MZ optical waveguide structure with a width of 8 µm embedded in a PDMS film for the single-mode l...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 55; no. 6S1; pp. 6 - 06GD01
Main Authors: Parajuli, Raj Kumar, Saruya, Ryota, Akutzu, Naoki, Miura, Satoshi, Kada, Wataru, Kawabata, Shunsuke, Matsubara, Yoshinori, Satoh, Takahiro, Koka, Masashi, Yamada, Naoto, Kamiya, Tomihiro, Miura, Kenta, Hanaizumi, Osamu
Format: Journal Article
Language:English
Published: The Japan Society of Applied Physics 01-06-2016
Subjects:
Embedded structures
Lasers
Microbeams
Optical waveguides
Proton beams
Silicone resins
Stresses
Waveguides
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Summary:A flexible Mach-Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton microbeam was used to fabricate a 40 × 20 mm2 MZ optical waveguide structure with a width of 8 µm embedded in a PDMS film for the single-mode light propagation of infrared (IR) laser light. The structure was measured by ion-beam-induced luminescence (IBIL) analysis and the beam fluence was optimized according to the IBIL intensity obtained from the waveguide structure. The entire structure of the MZ waveguide functioned well, confirmed by observing the near-field pattern (NFP) with a tunable IR laser (1.55 µm) for different PDMS film conditions. The optical throughput measurements for different sample configurations were obtained under continuous mechanical stress and a relatively low optical loss was observed at an inclination angle of 16°. Our results suggest that the MZ waveguide can be used for optical interlink connections under continuous mechanical stress.
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content type line 23
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.55.06GD01