Extraction of optical properties of flat and surface-textured transparent conductive oxide films in a broad wavelength range

An accurate characterization method is developed to determine the refractive index of smooth and surface-textured transparent conductive oxide (TCOs) films. The properties are obtained from simultaneous fitting of simulated specular reflectance/transmittance spectra to spectroscopic measurements for...

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Bibliographic Details
Published in:	Thin solid films Vol. 520; no. 3; pp. 1096 - 1101
Main Authors:	Sap, J.A., Isabella, O., Jäger, K., Zeman, M.
Format:	Journal Article
Language:	English
Published:	Amsterdam Elsevier B.V 30-11-2011 Elsevier
Subjects:	Computer simulation Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Extraction Fittings Light scattering Mathematical models Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Physics Reflectance Refractive index Refractivity Scattering Structure and morphology; thickness Surface and interface electron states Surface roughness Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Thin-film solar cells Transparent conductive oxide Thin-film solar cells Surface roughness Transparent conductive oxide Scattering Refractive index Electronic properties Light scattering Digital simulation Roughness Transmittance Surface states Thin films Reflectivity Free carrier Dielectric function Energy gap Transparent thin film Reflection spectrum Thin film devices Optical properties Incidence angle Conductive coating
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Summary:	An accurate characterization method is developed to determine the refractive index of smooth and surface-textured transparent conductive oxide (TCOs) films. The properties are obtained from simultaneous fitting of simulated specular reflectance/transmittance spectra to spectroscopic measurements for different polarizations and angles of light incidence. The simulations are based on a combination of physical models describing dielectric function of TCO films. Besides the refractive index also other material properties of TCO films are obtained, such as the band gap and free carrier absorption. A light scattering model is implemented into the simulations to take into account the diffused part of the light scattered at randomly-textured surfaces of TCO films.
Bibliography:	ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23
ISSN:	0040-6090 1879-2731
DOI:	10.1016/j.tsf.2011.08.023