Search Results - "Sangrador, Jesus"

Influence of crystal quality on the excitation and propagation of surface and bulk acoustic waves in polycrystalline AlN films by Clement, Marta, Olivares, J., Capilla, J., Sangrador, J., Iborra, E.

“…We investigate the excitation and propagation of acoustic waves in polycrystalline aluminum nitride films along the directions parallel and normal to the…”
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IR uncooled bolometers based on amorphous GexSi1-xOy on silicon micromachined structures by IBORRA, Enrique, CLEMENT, Marta, HERRERO, Lucia Vergara, SANGRADOR, Jesus

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Effect of particle bombardment on the orientation and the residual stress of sputtered AlN films for SAW devices by Iborra, E., Clement, M., Sangrador, J., Sanz-Hervas, A., Vergara, L., Aguilar, M.

“…We present a study of the effect of particle bombardment on the preferred orientation and the residual stress of polycrystalline aluminum nitride (AlN) thin…”
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Growth of carbon nanotube forests on metallic thin films by Olivares, Jimena, Mirea, Teona, Díaz-Durán, Bárbara, Clement, Marta, DeMiguel-Ramos, Mario, Sangrador, Jesús, de Frutos, José, Iborra, Enrique

“…Growing carbon nanotube (CNT) forests on metals for integrated circuits interconnections or active layers applications is currently a challenge. CNT forests…”
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Resonant and Antiresonant Frequencies Behavior with Temperature Changes in Gravimetric Sensors by Mirea, Teona, Clement, Marta, Olivares, Jimena, Sangrador, Jesus, Iborra, Enrique

“…Gravimetric sensing with high accuracy is one of the challenges of the electroacoustic technology. Thin film bulk acoustic wave resonators have boosted the…”
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High-acoustic-impedance tantalum oxide layers for insulating acoustic reflectors by Capilla, J., Olivares, J., Clement, M., Sangrador, J., Iborra, E., Devos, A.

“…This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors…”
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Circuital Model for the Analysis of the Piezoelectric Response of AlN Films Using SAW Filters by Iborra, Enrique, Vergara, Lucia, Sangrador, Jesus, Clement, Marta, Sanz-Hervas, Alfredo, Olivares, Jimena

“…We describe a method to assess the piezoelectric response of a piezoelectric thin film deposited on a conductive substrate. It is based on analyzing the…”
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Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements by Clement, Marta, Felmetsger, Valeriy, Olivares, Jimena, Mirea, Teona, Sangrador, Jesus

“…Al 0.7 Sc 0.3 N films were reactively sputtered from Al-Sc segmented targets by ac powered dual-cathode S-gun magnetron. Films with homogeneous Sc…”
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AlN-based solidly mounted resonators at 400ºC: in-situ performance monitoring by Mirea, Teona, Olivares, Jimena, Clement, Marta, Sangrador, Jesus

“…Acoustic wave sensors, particularly surface acoustic wave (SAW) devices, have been one of the most studied options for high temperature applications. Although…”
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AlN-Based Solidly Mounted Resonators on Glass Substrates for High Temperature Applications by Mirea, Teona, Olivares, Jimena, Clement, Marta, Sangrador, Jesus, Iborra, Enrique

“…Acoustic wave resonators have been widely investigated for processes monitoring under harsh environments, particularly high temperatures, due to their low cost…”
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Direct integration of CNT forests on solidly mounted resonators and their influence on device performance by Mirea, Teona, Olivares, Jimena, Clement, Marta, Sangrador, Jesus, Iborra, Enrique

“…Carbon nanotubes (CNTs) have been typically employed as active layers in sensors, however their vertically-aligned (forest) morphology has not been fully…”
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AlN-solidly mounted resonators sustaining up to 1000°C with TCF compensation by Mirea, Teona, Olivares, Jimena, Clement, Marta, Olivera, Jose Luis, Sangrador, Jesus, Iborra, Enrique

“…Surface acoustic wave (SAW) devices are currently the most exploited acoustic wave devices for high temperature applications due to their straightforward…”
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IR uncooled bolometers based on amorphous Ge sub(x)Si sub(1-x)O sub(y) on silicon micromachined structures by Iborra, Enrique, Clement, Marta, Herrero, Lucia Vergara, Sangrador, Jesus

“…In this work, we present the fabrication of bulk micromachined microbolometers made of amorphous germanium-silicon-oxygen compounds (Ge sub(x )Si sub(1-x)O…”
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Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications by Iborra, E., Olivares, J., Clement, M., Vergara, L., Sanz-Hervás, A., Sangrador, J.

“…In this work we investigate the suitability of piezoelectric aluminium nitride (AlN) films deposited by RF sputtering as the actuating element in…”
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Circuital model for the analysis of the piezoelectric response of A1N films using SAW filters by Iborra, Enrique, Vergara, Lucia, Sangrador, Jesús, Clement, Marta, Sanz-Hervás, Alfredo, Olivares, Jimena

“…In this paper we describe a method to assess the piezoelectric response of a piezoelectric thin film deposited on a conductive substrate. It is based on…”
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MEMS Actuated Piezoelectrically with AlN Films by Gonzalez-Castilla, S., Malo, J., Vergara, L., Olivares, J., Clement, M., Ignacio Izpura, J., Sangrador, J., Iborra, E.

“…We analyse the mechanical response of a doubly-clamped microbridge actuated piezoelectrically using sputtered AlN, working first as an actuator and then as a…”
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