Search Results - "Sanchez, E.K."
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Volume production of high quality SiC substrates and epitaxial layers: Defect trends and device applications
Published in Journal of crystal growth (01-08-2012)“…We review the progress of silicon carbide (SiC) bulk growth by the sublimation method, highlighting recent advances at Dow Corning, which resulted in the…”
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Journal Article Conference Proceeding -
2
Studies of the Origins of Half-Loop Arrays and Interfacial Dislocations Observed in Homoepitaxial Layers of 4H-SiC
Published in Journal of electronic materials (01-05-2015)“…Synchrotron x-ray topography and KOH etching studies have been carried out on n -type 4H-SiC offcut substrates before and after homoepitaxial growth to study…”
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Journal Article -
3
Origin of basal plane bending in hexagonal silicon carbide single crystals
Published in Journal of crystal growth (15-08-2008)“…4H-SiC crystals grown by the physical vapor transport method were investigated using high-resolution X-ray diffraction, defect selective etching, and…”
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Journal Article -
4
Formation of thermal decomposition cavities in physical vapor transport of silicon carbide
Published in Journal of electronic materials (01-03-2000)“…The relationship between seed mounting and the formation of thermal decomposition cavities in physical vapor transport grown silicon carbide was investigated…”
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Journal Article