Search Results - "Sameshima, Katsumi"

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  1. 1

    Surface morphology of lead-based thin films and their properties by ATSUKI, T, SOYAMA, N, SASAKI, G, YONEZAWA, T, OGI, K, SAMESHIMA, K, HOSHIBA, K, NAKAO, Y, KAMISAWA, A

    Published in Japanese Journal of Applied Physics (01-09-1994)
    “…Surface morphology of lead-zirconate-titanate [PZT(52/48)] thin films prepared by sol-gel processing on Pt/Ti/ SiO 2 /Si substrates was studied. When the…”
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    Conference Proceeding Journal Article
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    Preparation of (Pb, La)(Zr, Ti)O 3 Ferroelectric Films by RF Sputtering on Large Substrate by Suu, Koukou, Osawa, Akira, Tani, Noriaki, Ishikawa, Michio, Nakamura, Kyuzo, Ozawa, Takanori, Sameshima, Katsumi, Kamisawa, Akira, Takasu, Hideshi

    Published in Japanese Journal of Applied Physics (01-09-1996)
    “…(Pb, La)(Zr, Ti)O 3 (PLZT) thin films were deposited on 6-inch Pt/Ti/SiO 2 /Si substrates by rf magnetron sputtering using a multichamber production system…”
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    Journal Article
  6. 6

    Preparation of Pb(Zr, Ti)O 3 Films on Pt/Ti/Ta Electrodes by Sol-Gel Process by Sameshima, Katsumi, Nakamura, Takashi, Hoshiba, Kazuhiro, Nakao, Yuichi, Kamisawa, Akira, Atsuki, Tsutomu, Soyama, Nobuyuki, Ogi, Katsumi

    Published in Japanese Journal of Applied Physics (01-09-1993)
    “…PbZr x Ti 1- x O 3 (PZT) films were prepared on Pt, Pt/Ti or Pt/Ti/Ta electrodes by the sol-gel process using rapid thermal annealing (RTA). In the case of Pt…”
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    Journal Article
  7. 7

    Micro-patterning of PbZr sub(x)Ti sub(1-x)O sub(3) thin films prepared by photo sensitive sol-gel solution by Nakao, Yuichi, Nakamura, Takashi, Hoshiba, Kazuhiro, Sameshima, Katsumi, Kamisawa, Akira, Abe, Kohji, Soyama, Nobuyuki, Ogi, Katsumi

    “…The photo sensitivity of sol-gel solution of PbZr sub(x)Ti sub(1-x)O sub(3) (PZT) was studied. A coated film of the sol-gel solution on Pt/Ti/SiO sub(2)/Si…”
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    Journal Article
  8. 8

    Preparation of Pb(Zi, Ti)O sub(3) films on Pt/Ti/Ta electrodes by sol-gel process by Sameshima, Katsumi, Nakamura, Takashi, Hoshiba, Kazuhiro, Nakao, Yuichi, Kamisawa, Akira, Atsuki, Tsutomu, Soyama, Nobuyuki, Ogi, Katsumi

    “…PbZr sub(x)Ti sub(1-x)O sub(3) (PZT) films were prepared on Pt, Pt/Ti or Pt/Ti/Ta electrodes by the sol-gel process using rapid thermal annealing (RTA). In the…”
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    Journal Article
  9. 9

    Micro-Patterning of PbZr x Ti 1-x O 3 Thin Films Prepared by Photo Sensitive Sol-Gel Solution by Nakao, Yuichi, Nakamura, Takashi, Hoshiba, Kazuhiro, Sameshima, Katsumi, Kamisawa, Akira, Kohji Abe, Kohji Abe, Nobuyuki Soyama, Nobuyuki Soyama, Katsumi Ogi, Katsumi Ogi

    Published in Japanese Journal of Applied Physics (01-09-1993)
    “…The photo sensitivity of sol-gel solution of PbZr x Ti 1- x O 3 (PZT) was studied. A coated film of the sol-gel solution on Pt/Ti/SiO 2 /Si substrates was…”
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    Journal Article