Search Results - "Sameshima, Katsumi"
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1
Surface morphology of lead-based thin films and their properties
Published in Japanese Journal of Applied Physics (01-09-1994)“…Surface morphology of lead-zirconate-titanate [PZT(52/48)] thin films prepared by sol-gel processing on Pt/Ti/ SiO 2 /Si substrates was studied. When the…”
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Conference Proceeding Journal Article -
2
Micro-patterning of PbZrxTi1-xO3 thin films prepared by photo sensitive sol-gel solution
Published in Japanese journal of applied physics (01-09-1993)Get full text
Conference Proceeding -
3
Preparation of (Pb, La) (Zr, Ti)O3 ferroelectric films by RF sputtering on large substrate
Published in Japanese journal of applied physics (1996)Get full text
Conference Proceeding -
4
Preparation of Pb(Zr,Ti)O3 films on Pt/Ti/Ta electrodes by sol-gel process
Published in Japanese journal of applied physics (01-09-1993)Get full text
Conference Proceeding -
5
Preparation of (Pb, La)(Zr, Ti)O 3 Ferroelectric Films by RF Sputtering on Large Substrate
Published in Japanese Journal of Applied Physics (01-09-1996)“…(Pb, La)(Zr, Ti)O 3 (PLZT) thin films were deposited on 6-inch Pt/Ti/SiO 2 /Si substrates by rf magnetron sputtering using a multichamber production system…”
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Journal Article -
6
Preparation of Pb(Zr, Ti)O 3 Films on Pt/Ti/Ta Electrodes by Sol-Gel Process
Published in Japanese Journal of Applied Physics (01-09-1993)“…PbZr x Ti 1- x O 3 (PZT) films were prepared on Pt, Pt/Ti or Pt/Ti/Ta electrodes by the sol-gel process using rapid thermal annealing (RTA). In the case of Pt…”
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Journal Article -
7
Micro-patterning of PbZr sub(x)Ti sub(1-x)O sub(3) thin films prepared by photo sensitive sol-gel solution
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01-01-1993)“…The photo sensitivity of sol-gel solution of PbZr sub(x)Ti sub(1-x)O sub(3) (PZT) was studied. A coated film of the sol-gel solution on Pt/Ti/SiO sub(2)/Si…”
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Journal Article -
8
Preparation of Pb(Zi, Ti)O sub(3) films on Pt/Ti/Ta electrodes by sol-gel process
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01-01-1993)“…PbZr sub(x)Ti sub(1-x)O sub(3) (PZT) films were prepared on Pt, Pt/Ti or Pt/Ti/Ta electrodes by the sol-gel process using rapid thermal annealing (RTA). In the…”
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Journal Article -
9
Micro-Patterning of PbZr x Ti 1-x O 3 Thin Films Prepared by Photo Sensitive Sol-Gel Solution
Published in Japanese Journal of Applied Physics (01-09-1993)“…The photo sensitivity of sol-gel solution of PbZr x Ti 1- x O 3 (PZT) was studied. A coated film of the sol-gel solution on Pt/Ti/SiO 2 /Si substrates was…”
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Journal Article