Search Results - "Sakuraba, Masao"
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Computational Efficiency of a Modular Reservoir Network for Image Recognition
Published in Frontiers in computational neuroscience (05-02-2021)“…Liquid state machine (LSM) is a type of recurrent spiking network with a strong relationship to neurophysiology and has achieved great success in time series…”
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Amphiphobic Septa Enhance the Mechanical Stability of Free-Standing Bilayer Lipid Membranes
Published in Langmuir (15-05-2018)“…Artificial bilayer lipid membranes (BLMs) provide well-defined systems for investigating the fundamental properties of membrane proteins, including ion…”
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Epitaxial growth of Si1−xGex alloys and Ge on Si(100) by electron-cyclotron-resonance Ar plasma chemical vapor deposition without substrate heating
Published in Thin solid films (01-04-2014)“…By using electron-cyclotron-resonance (ECR) Ar-plasma chemical vapor deposition (CVD) without substrate heating, the epitaxial growth process of Si1−xGex alloy…”
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4
Silicon-Carbon alloy film formation on Si(100) using SiH4 and CH4 reaction under low-energy ECR Ar plasma irradiation
Published in Materials science in semiconductor processing (01-11-2017)“…Epitaxial growth of Si-C alloy films on Si(100) were achieved in the C fraction range up to about 5at% by surface reaction of SiH4 and CH4 under low-energy Ar…”
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Carrier properties of B atomic-layer-doped Si films grown by ECR Ar plasma-enhanced CVD without substrate heating
Published in Science and technology of advanced materials (01-01-2017)“…The atomic-layer (AL) doping technique in epitaxy has attracted attention as a low-resistive ultrathin semiconductor film as well as a two-dimensional (2-D)…”
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Electronic properties of Si/Si-Ge Alloy/Si(100) heterostructures formed by ECR Ar plasma CVD without substrate heating
Published in Materials science in semiconductor processing (01-11-2017)“…By using our low-energy Ar plasma enhanced chemical vapor deposition (CVD) at a substrate temperature below 100°C during plasma exposure without substrate…”
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Nitrogen doping effect upon hole tunneling characteristics of Si barriers in Si1-xGex/Si resonant tunneling diode
Published in Thin solid films (30-04-2014)“…Nitrogen atomic-layer (N AL) doping effects upon hole tunneling characteristics of double 4nm-thick Si barriers in the strained Si1−xGex/Si(100) hole resonant…”
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Epitaxial growth of B-doped Si on Si(100) by electron-cyclotron-resonance Ar plasma chemical vapor deposition in a SiH4–B2H6–H2 gas mixture without substrate heating
Published in Thin solid films (01-04-2014)“…Characteristics of B-doped Si epitaxial growth on Si(100) by using electron-cyclotron-resonance Ar plasma enhanced chemical vapor deposition without substrate…”
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Electrical properties and B depth profiles of in-situ B doped Si films grown by ECR Ar plasma CVD without substrate heating
Published in Materials science in semiconductor processing (01-11-2017)“…In-situ B doping in epitaxial and amorphous Si films was investigated by low-energy electron-cyclotron-resonance (ECR) Ar plasma chemical vapor deposition…”
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Behavior of N atoms after thermal nitridation of Si1−xGex surface
Published in Thin solid films (01-02-2012)“…Behavior of N atoms after thermal nitridation of Si1−xGex (100) surface in NH3 atmosphere at 400°C was investigated. X-ray photoelectron spectroscopy (XPS)…”
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Heavy B atomic-layer doping in Si epitaxial growth on Si(100) using electron-cyclotron-resonance plasma CVD
Published in Thin solid films (2010)“…Heavy B atomic-layer doping in Si epitaxial growth on Si(100) by electron-cyclotron-resonance (ECR) Ar plasma enhanced chemical vapor deposition (CVD) has been…”
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12
Very low-temperature epitaxial growth of silicon and germanium using plasma-assisted CVD
Published in Thin solid films (03-11-2008)“…By electron-cyclotron resonance Ar plasma enhanced chemical-vapor deposition, Si and Ge epitaxial growth on Si(100) were achieved without substrate heating…”
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Heavy atomic-layer doping of B in low-temperature Si epitaxial growth on Si(1 0 0) by ultraclean low-pressure chemical vapor deposition
Published in Applied surface science (30-07-2008)“…Electrical characteristics of B atomic-layer doped Si epitaxial films on Si(1 0 0) formed by B atomic-layer formation on Si(1 0 0) at 180 °C and subsequent…”
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Heavy B atomic-layer doping characteristics in Si epitaxial growth on B adsorbed Si(1 0 0) by ultraclean low-pressure CVD system
Published in Solid-state electronics (01-08-2009)“…Heavy B atomic-layer doping is performed by B atomic-layer formation on Si(1 0 0) using B 2H 6 and subsequent Si capping layer deposition using SiH 4. By B 2H…”
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Heavy atomic-layer doping of nitrogen in Si1−Ge film epitaxially grown on Si(100) by ultraclean low-pressure CVD
Published in Thin solid films (01-01-2010)Get full text
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Strain relaxation by stripe patterning in Si/Si1-xGex/Si(100) heterostructures
Published in Thin solid films (05-06-2006)“…The relaxation of strain in Si/Si1-xGex/Si(100) heterostructure by stripe patterning in [110] direction has been investigated using Raman scattering…”
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Behavior of N atoms in atomic-order nitrided Si0.5Ge0.5(1 0 0)
Published in Applied surface science (01-07-2008)Get full text
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Self-limited growth of Si on B atomic-layer formed Ge(1 0 0) by ultraclean low-pressure CVD system
Published in Applied surface science (30-07-2008)“…Utilizing BCl 3 reaction on Ge(1 0 0) and subsequent Si epitaxial growth by SiH 4 reaction at 300 °C, B atomic-layer doping in Si/Ge(1 0 0) heterostructure was…”
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Journal Article Conference Proceeding -
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Atomic-layer doping in Si by alternately supplied NH3 and SiH4
Published in Applied physics letters (19-05-2003)“…Low-temperature Si growth on the atomic-layer order nitrided Si(100) surface with N amount of 1–6×1014 cm−2 formed by NH3 reaction at 400 °C were investigated…”
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