Search Results - "Sakhonenkov, S. S."
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Re-distribution of oxygen at the interface between γ-Al2O3 and TiN
Published in Scientific reports (03-07-2017)“…Interface of TiN electrode with γ-Al 2 O 3 layers was studied using near edge X-ray absorption fine structure, conventional X-ray photoelectron spectroscopy…”
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Relationship between Ta Oxidation State and Its Local Atomic Coordination Symmetry in a Wide Range of Oxygen Nonstoichiometry Extent of TaO x
Published in Journal of physical chemistry. C (21-03-2019)“…Evolution of electronic and atomic structure of amorphous Ta2O5 during sputtering by Ar+ ions was investigated by means of X-ray photoelectron spectroscopy…”
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Study of the Effect of Si and Be Barrier Layers on Crystallization of Cr/Sc Multilayer X-ray Mirror
Published in Crystallography reports (01-02-2024)“…The influence of Si and Be barrier layers on the mixing of thin layers of multilayer X-ray mirrors based on Cr and Sc in a wide temperature range has been…”
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Chemical interaction and electronic structure in a compositionally complex alloy: A case study by means of X-ray absorption and X-ray photoelectron spectroscopy
Published in Journal of alloys and compounds (15-03-2021)“…Chemical interaction and changes in local electronic structure of Cr, Fe, Co, Ni and Cu transition metals (TMs) upon formation of an Al8Co17Cr17Cu8Fe17Ni33…”
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Effect of deposition technique on chemical bonding and amount of porogen residues in organosilicate glass
Published in Microelectronic engineering (25-06-2017)“…Impact of deposition technique on the chemical bonding in low-κ organosilicate glass (OSG) films and on porogen residues was studied using near edge X-ray…”
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Inhibition of Oxygen Scavenging by TiN at the TiN/SiO2 Interface by Atomic-Layer-Deposited Al2O3 Protective Interlayer
Published in Journal of physical chemistry. C (12-09-2019)“…Chemical composition of interfaces between physical-vapor-deposited TiN and SiO2 as affected by introduction of a thin (0.5–3 nm) alumina interlayer was…”
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Study of Interfaces of Mo/Be Multilayer Mirrors Using X‑ray Photoelectron Spectroscopy
Published in Journal of physical chemistry. C (24-10-2019)“…In the present work, formation of interfaces in the multilayer periodic Mo/Be mirror was studied using X-ray photoelectron spectroscopy. Chemical composition…”
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Mechanisms of TiN Effective Workfunction Tuning at Interfaces with HfO2 and SiO2
Published in Journal of physical chemistry. C (16-07-2020)“…By use of a combination of electrical measurements and internal photoemission interface barrier characterization, the effective workfunction (EWF) changes of…”
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Analysis of Oxygen and Nitrogen Redistribution at Interfaces of HfO2 with Laminate TiN/TiAl/TiN Electrodes
Published in Journal of physical chemistry. C (23-07-2020)“…The physicochemical nature of the change in the effective work function (EWF) of aluminum doped TiN (using TiN/TiAl/TiN laminate structure) was studied by…”
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Effect of Insertion of B4C at the Interface Mo/Be Depending on the Film Order
Published in Journal of physical chemistry. C (15-10-2020)“…In the present work, the formation of an interface region in the multilayer periodic Mo/Be mirrors was studied using X-ray photoelectron spectroscopy. The…”
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Refined thermal stability of Cr/Sc multilayers with Si(Be) barrier layers
Published in Applied surface science (15-02-2023)“…[Display omitted] •Annealing led to full mixing of layers in Cr/Sc at 450°C.•Texturing with Sc [001] preferred orientation is occurred in Cr/Sc at…”
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Increasing the thermal stability of a Cr/Sc multilayer by nitriding
Published in Applied surface science (30-01-2024)Get full text
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Effect of annealing on layer intermixing in nanoscale Cr/Ti multilayers depending on the period value
Published in Applied surface science (01-11-2024)“…[Display omitted] •Annealing increases mixing of the layers with formation of TiCrx.•Contribution of TiCrx increases significantly as the period…”
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Layer intermixing in ultrathin Cr/Be layered system and impact of barrier layers on interface region
Published in Applied surface science (30-12-2021)“…[Display omitted] •CrBe2 and CrBe12 are formed at the Cr-on-Be and Be-on-Cr interfaces, respectively.•In ultrathin Cr/Be layered system there is complete…”
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Effect of B4C barrier layer on layer intermixing in nanoscale W/Be multilayers before and after annealing
Published in Applied surface science (30-12-2022)“…[Display omitted] •Borides/carbides of W are formed in W/Be with an ultrathin B4C layer.•Be2C forms when B4C deposited on Be.•Utilizing ultrathin B4C layer…”
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Interface formation between Be and W layers depending on its thickness and ordering
Published in Applied surface science (30-12-2020)“…[Display omitted] •WBe2 and WBe12 are formed at the W-on-Be and Be-on-W interfaces, respectively.•WBe2 thickness does not depend on the W top layer…”
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Nanoscale W/Be multilayers: Intermixing during magnetron sputtering deposition and effect of heat treatment
Published in Applied surface science (01-01-2022)“…[Display omitted] •WBe12 and WBe2 are formed in W/Be multilayers systems during magnetron sputtering.•Stoichiometry of beryllide is mainly determined by…”
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Re-distribution of oxygen at the interface between γ-Al 2 O 3 and TiN
Published in Scientific reports (03-07-2017)“…Interface of TiN electrode with γ-Al O layers was studied using near edge X-ray absorption fine structure, conventional X-ray photoelectron spectroscopy and…”
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Role of Postdeposition Annealing and Doping with Si and Al Impurities in the Formation of Hf x Si1–x O2 at the SiO2/FE:HfO2 Interface in a Ferroelectric Field-Effect Transistor
Published in Journal of physical chemistry. C (25-05-2023)“…Characterization of the composition and extension of the SiO2/HfO2 interface in the model systems Si-sub./SiO2 (7.5 nm)/FE:HfO2 (9.5 nm)/TiN (9 nm) for…”
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