Search Results - "Saarilahti, Jaakko"

Properties of nanocrystalline silicon probed by optomechanics by Navarro-Urrios, Daniel, Colombano, Martín F., Maire, Jeremie, Chávez-Ángel, Emigdio, Arregui, Guillermo, Capuj, Néstor E., Devos, Arnaud, Griol, Amadeu, Bellieres, Laurent, Martínez, Alejandro, Grigoras, Kestutis, Häkkinen, Teija, Saarilahti, Jaakko, Makkonen, Tapani, Sotomayor-Torres, Clivia M., Ahopelto, Jouni

“…Nanocrystalline materials exhibit properties that can differ substantially from those of their single crystal counterparts. As such, they provide ways to…”
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Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications by Pernu, Tapio, Saarilahti, Jaakko, Kyynarainen, Jukka, Sillanpaa, Teuvo

“…An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for…”
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Integrated Radiometer at 240 GHz With SiGe MMIC Detector and GRIN Silicon Lens by Pursula, Pekka, Lamminen, Antti, Forsten, Henrik, Sipola, Hannu, Tappura, Kirsi, Saarilahti, Jaakko, Varonen, Mikko, Ermolov, Vladimir, Kantanen, Mikko

“…We describe an integrated radiometer at 240 GHz consisting of a direct detection MMIC fabricated in BiCMOS SiGe and a silicon gradient refractive index (GRIN)…”
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Wafer Level Integration of Sub-THz and THz Systems by Ermolov, Vladimir, Lamminen, Antti, Saarilahti, Jaakko, Varonen, Mikko, Kantanen, Mikko, Lahti, Markku, Pursula, Pekka

“…The letter presents a wafer level integration technology for sub-THz and THz systems. The developed integration process relies on deep reactive ion etching…”
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Rutherford backscattering and kinetics study of the photo-induced solid state chemical reaction between silver and amorphous As33S67 layers by Wagner, Tomáš, Peřina, Vratislav, Vlček, Miroslav, Frumar, Miloslav, Rauhala, Eero, Saarilahti, Jaakko, Ewen, Peter J.S.

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A 3D micromechanical compass by Kyynäräinen, Jukka, Saarilahti, Jaakko, Kattelus, Hannu, Kärkkäinen, Anu, Meinander, Tor, Oja, Aarne, Pekko, Panu, Seppä, Heikki, Suhonen, Mika, Kuisma, Heikki, Ruotsalainen, Sami, Tilli, Markku

“…We have designed and fabricated micromechanical magnetometers intended for a 3D electronic compass which could be embedded in portable devices. The sensors are…”
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The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens by Lamminen, Antti, Tamminen, Aleksi, Saarilahti, Jaakko, Ermolov, Vladimir, Pursula, Pekka

“…This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation…”
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Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate by Torkkeli, Altti, Rusanen, Outi, Saarilahti, Jaakko, Seppä, Heikki, Sipola, Hannu, Hietanen, Jarmo

“…A capacitive single-chip silicon microphone with very low-stress polysilicon membrane was fabricated. A mechanism for stress-releasing due to the high stress…”
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3D Thin Film Metrology without Cross-Sectional Sampling by Philip, Anish, Utriainen, Mikko, Werner, Thomas, Hyttinen, Pasi, Saarilahti, Jaakko, Kinnunen, Jussi, Gao, Feng

“…Conformal coating in high aspect ratio substrates is a crucial factor in the development of next generation 3D semiconductor devices. Conventional approaches…”
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Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements by Karuthedath, Cyril Baby, Sebastian, Abhilash Thanniyil, Saarilahti, Jaakko, Sillanpaa, Teuvo, Pensala, Tuomas

“…Beam-drift based flow measurement technique requires frequency matched ultrasound transmitters and receivers for determining the flow rate. Aluminum nitride…”
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Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror by Ailas, Henri, Saarilahti, Jaakko, Pensala, Tuomas, Kiihamaki, Jyrki

“…In this study, a low temperature wafer-level packaging process aimed for encapsulating MEMS mirrors was developed. The glass cap wafer used in the package has…”
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Silicon Gradient Refractive Index Lens for Millimeter Wave Radiometers by Pursula, Pekka, Lamminen, Antti, Mannila, Rami, Tappura, Kirsi, Saarilahti, Jaakko

“…We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and…”
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Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters by Lamminer, Antti, Saarilahti, Jaakko, Pursula, Pekka, Kantanen, Mikko, Ermolov, Vladimir

“…We demonstrate sub-THz waveguides, low-pass and band-pass micromachined filters at frequency range 225-325 GHz. Impact of fabrication processes and electrical…”
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Sub-THz micromachined waveguides for wafer level integration of MMICs by Pursula, Pekka, Lamminen, Antti, Kantanen, Mikko, Saarilahti, Jaakko, Ermolov, Vladimir

“…We demonstrate first results towards sub-THz integration system based on micromachined waveguides on Silicon. The demonstrated components at 270 GHz include…”
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Sub-THz micromachined waveguides for wafer level integration of MMICs by Pursula, Pekka, Lamminen, Antti, Kantanen, Mikko, Saarilahti, Jaakko, Ermolov, Vladimir

“…We demonstrate first results towards sub-THz integration system based on micromachined waveguides on Silicon. The demonstrated components at 270 GHz include…”
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Comparison of Micromachined Dielectric and Metallic Waveguides for THz applications by Pursula, Pekka, Cherchi, Matteo, Lamminen, Antti, Kantanen, Mikko, Saarilahti, Jaakko, Ermolov, Vladimir

“…The paper considers micromachined dielectric and metallic waveguides for THz applications. Analytical analysis and simulation of losses for ideal structures…”
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Properties of Nanocrystalline Silicon Probed by Optomechanics by Navarro-Urrios, Daniel, Colombano, Martin F, Maire, Jeremie, Chavez-Angel, Emigdio, Arregui, Guillermo, Capuj, Nestor E, Devos, Arnaud, Griol, Amadeu, Bellieres, Laurent, Martinez, Alejandro, Grigoras, Kestutis, Hakkinen, Teija, Saarilahti, Jaakko, Makkonen, Tapani, Sotomayor-Torres, Clivia M, Ahopelto, Jouni

“…Nanocrystalline materials exhibit properties that can differ substantially from those of their single crystal counterparts. As such, they provide ways to…”
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3D flip chip packaging of MEMS sensor by Gadda, Akiko, Tuovinen, Reijo, Rimminen, Henry, Lalu, Sinikka, Saarilahti, Jaakko, Karkkainen, Anu

“…Advanced 3D packaging of a Micro Electro Mechanical Systems (MEMS) chip and a CMOS/ASIC Chip was studied. We successfully introduced redistribution process…”
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Rutherford backscattering and kinetics study of the photo-induced solid state chemical reaction between silver and amorphous As 33S 67 layers by Wagner, Tomáš, Peřina, Vratislav, Vlček, Miroslav, Frumar, Miloslav, Rauhala, Eero, Saarilahti, Jaakko, Ewen, Peter J.S.

“…The kinetics of the photo-induced solid state chemical reaction of silver with a-As 33S 67 films in a conventional sandwich structure was measured by…”
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Capacitive silicon microphone by Torkkeli, Altti, Saarilahti, Jaakko, Seppä, Heikki, Sipola, Hannu, Rusanen, Outi, Hietanen, Jarmo

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