Search Results - "SENTURIA, S. D"

Macro Power from Micro Machinery by Epstein, A. H., Senturia, S. D.

“…Applications are emerging for technology for microengineering that dates back to 1980s. Promising microdevices include gas microturbines that generate energy…”
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Extending the travel range of analog-tuned electrostatic actuators by Hung, E.S., Senturia, S.D.

“…The pull-in instability limits the travel distance of elastically suspended parallel-plate electrostatic microactuators to about 1/3 of the undeflected gap…”
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M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures by Osterberg, P.M., Senturia, S.D.

“…A set of electrostatically actuated microelectromechanical test structures is presented that meets the emerging need for microelectromechanical systems (MEMS)…”
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Computer-aided generation of nonlinear reduced-order dynamic macromodels. I. Non-stress-stiffened case by Gabbay, L. D., Mehner, Jan E., Senturia, S. D.

“…Reduced-order dynamic macromodels are an effective way to capture device behavior for rapid circuit and system simulation. In this paper, we report the…”
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Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs by Hung, E.S., Senturia, S.D.

“…In this paper, we demonstrate how efficient low-order dynamical models for micromechanical devices can be constructed using data from a few runs of fully…”
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Electrostatic curved electrode actuators by Legtenberg, R., Gilbert, J., Senturia, S.D., Elwenspoek, M.

“…This paper presents the design and performance of an electrostatic actuator consisting of a laterally compliant cantilever beam and a fixed curved electrode,…”
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Simulation and design of microsystems: a 10-year perspective by Senturia, Stephen D.

“…10 years ago, the concept of special CAD systems for microsensors and microactuators was proposed at Transducers '87. We now look back over this 10-year…”
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Speed-energy optimization of electrostatic actuators based on pull-in by Castaner, L.M., Senturia, S.D.

“…The speed and total energy required to accomplish pull-in switching of a generic electrostatic actuator is examined. It is found that the value of the source…”
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Pull-in time–energy product of electrostatic actuators: comparison of experiments with simulation by Castañer, L, Rodrı́guez, A, Pons, J, Senturia, S.D

“…Measurements of voltage and current transients of a scaled model of an electrostatic microactuator have been performed. Experiments were made at a variety of…”
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The reliability of microelectromechanical systems (MEMS) in shock environments by Srikar, V.T., Senturia, S.D.

“…As a first step toward formulating guidelines for the design of dynamically reliable MEMS, we analyze the mechanical response of, and formulate failure…”
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Thermoelastic damping in fine-grained polysilicon flexural beam resonators by Srikar, V.T., Senturia, S.D.

“…The design and fabrication of polysilicon flexural beam resonators with very high mechanical quality factors (Q) is essential for many MEMS applications. Based…”
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Electric micromotor dynamics by Bart, S.F., Mehregany, M., Tavrow, L.S., Lang, J.H., Senturia, S.D.

“…The dynamometry technique uses a strobe flash which is triggered from a phase excitation signal after a known time delay. This acts essentially as a video…”
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Micromotor fabrication by Mehregany, M., Senturia, S.D., Lang, J.H., Nagarkar, P.

“…Micromotor fabrication and related issues are discussed. The micromotors under study are of the variable-capacitance side-drive type with salient-pole and…”
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Computer-aided generation of nonlinear reduced-order dynamic macromodels. II. Stress-stiffened case by Mehner, J.E., Gabbay, L.D., Senturia, S.D.

“…For pt. I see ibid., vol. 9, no. 2, p. 262-9 (2000). Reduced-order dynamic macromodels to describe the behavior of microelectromechanical system structures…”
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Measurement of wear in polysilicon micromotors by Mehregany, M., Senturia, S.D., Lang, J.H.

“…Two polysilicon variable-capacitance rotary side-drive micromotor types, including harmonic and salient-pole, are described. Voltages as low as 26 and 35 V…”
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Dynamics and Response of Polymer-Coated Surface Acoustic Wave Devices: Effect of Viscoelastic Properties and Film Resonance by Martin, Stephen J, Frye, Gregory C, Senturia, Stephen D

“…The response of polymer-coated surface acoustic wave (SAW) devices to temperature changes and polymer vapor absorption is examined. A perturbational approach…”
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Radiation effects in nitrided oxides by Terry, F.L., Aucoin, R.J., Naiman, M.L., Senturia, S.D.

“…Electron radiation effects on silicon dioxide films, before and after ammonia annealing (nitridation), have been studied. The most striking result is that the…”
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Effect of surface roughness on the response of thickness-shear mode resonators in liquids by Martin, Stephen J, Frye, Gregory C, Ricco, Antonio J, Senturia, Stephen D

“…The effect of surface microstructure on the response of thickness-shear mode resonators in contact with liquids was examined. Resonators were fabricated with…”
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Inversion layer mobility of MOSFETs with nitrided oxide gate dielectrics by Schmidt, M.A., Terry, F.L., Mathur, B.P., Senturia, S.D.

“…Reports a degradation in effective channel mobility with increasing degree of nitridation, as much as 50% for electrons, noticeably less for holes. While both…”
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Effect of support compliance and residual stress on the shape of doubly supported surface-micromachined beams by Kobrinsky, M.J., Deutsch, E.R., Senturia, S.D.

“…Doubly supported silicon-micromachined beams are increasingly used to study the mechanical properties of materials. Residual stresses in the beams and support…”
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