Search Results - "S. F. Sianko"
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Control of local stress in semiconductor silicon structures
Published in Pribory i metody izmererij (17-09-2018)“…Residual stress distribution in multilayer semiconductor structure is complicated and has a significant impact on device characteristics and yield, therefore…”
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ESTIMATION OF TOPOGRAPHIC DEFECTS DIMENSIONS OF SEMICONDUCTOR SILICON STRUCTURES
Published in Pribory i metody izmererij (20-03-2018)“…The effect of non-flatness of semiconductor wafers on characteristics of manufactured devices is shown through defocusing of an image of a topological layout…”
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Quantitative characterization of topographic defects of semiconductor silicon wafers
Published in Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki (01-06-2019)“…The calculation of shadow images of the surfaces of semiconductor silicon wafers obtained by Makyoh topography is carried out. A quantitative relationship…”
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