Silicon structures with dielectric insulation obtained by vertical anisotropic etching

Silicon structures with dielectric insulation obtained by vertical anisotropic etching

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Bibliographic Details
Published in:Technical physics letters Vol. 27; no. 5; pp. 381 - 383
Main Authors: Guk, E. G., Tkachenko, A. G., Tokranova, N. A., Granitsyna, L. S., Astrova, E. V., Podlaskin, B. G., Nashchekin, A. V., Shul’pina, I. L., Rutkovskii, S. V.
Format: Journal Article
Language:English
Published: 01-05-2001
Online Access:Get full text
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Description
ISSN:1063-7850
1090-6533
DOI:10.1134/1.1376758