Search Results - "Royer, Agnès"

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    High power 2.5D integrated thermoelectric generators combined with microchannels technology by Savelli, Guillaume, Colonna, Jean-Philippe, Coudrain, Perceval, Faucherand, Pascal, Royer, Agnès, Collin, Louis-Michel, Amnache, Amrid, Fréchette, Luc

    Published in Energy (Oxford) (01-08-2022)
    “…We have developed high power integrated thermoelectric generators (μTEGs). These μTEGs are CMOS compatible, i.e. based on polycristalline SiGe materials. These…”
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    Journal Article
  2. 2

    Influences and Diffusion Effects of Lithium Contamination during the Thermal Oxidation Process of Silicon by Wandesleben, Annika F., Truffier‐Boutry, Delphine, Glowacki, Frédérique, Royer, Agnès, Lederer, Maximilian, Lilienthal‐Uhlig, Benjamin, Vogt, Carla

    Published in Advanced engineering materials (01-07-2024)
    “…Due to the increasing number of application fields using lithium compounds in the microelectronics sector, it is necessary to investigate the contamination…”
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    Journal Article