Search Results - "Royer, Agnès"
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High power 2.5D integrated thermoelectric generators combined with microchannels technology
Published in Energy (Oxford) (01-08-2022)“…We have developed high power integrated thermoelectric generators (μTEGs). These μTEGs are CMOS compatible, i.e. based on polycristalline SiGe materials. These…”
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Journal Article -
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Influences and Diffusion Effects of Lithium Contamination during the Thermal Oxidation Process of Silicon
Published in Advanced engineering materials (01-07-2024)“…Due to the increasing number of application fields using lithium compounds in the microelectronics sector, it is necessary to investigate the contamination…”
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Journal Article