Search Results - "Roozeboom, C. L."
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Integrated Multifunctional Environmental Sensors
Published in Journal of microelectromechanical systems (01-06-2013)“…We present the design, microfabrication, and characterization of ten sensors on one silicon die. We demonstrate simultaneous monitoring of multiple…”
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Journal Article -
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Integrated sensor cross-sensitivity analysis
Published in 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (01-06-2013)“…We present data and analysis of sensor cross-sensitivities to a range of environmental conditions: temperature, humidity, light intensity, air flow, magnetic…”
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Conference Proceeding -
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Multi-functional integrated sensors for the environment
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) (01-01-2012)“…We present multi-functional integrated sensors for the environment (MFISEs) combining ten sensor functions on a single silicon die. The purpose of the MFISEs…”
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Conference Proceeding -
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Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (01-01-2014)“…We present multifunctional integrated sensors (abbreviated MFISES) that combine temperature, humidity, pressure, air speed, chemical gas, magnetic, and…”
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Conference Proceeding