Search Results - "Roede, H"
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Clustertool optimization through scheduling rules
Published in 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) (1999)“…Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper,…”
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Conference Proceeding -
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Characterization and implementation of self-aligned TiSi/sub 2/ in submicrometer CMOS technology
Published in IEEE transactions on electron devices (01-01-1991)“…Characterization and process implementation of a self-aligned TiSi/sub 2/ in a submicrometer CMOS process are presented. The effects of different in situ…”
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3
High-throughput low temperature tungsten deposition process for 0.25 μm technology
Published 1999Get full text
Conference Proceeding -
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High-throughput low temperature tungsten deposition process for 0.25 /spl mu/m technology
Published in 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) (1999)“…A new high-throughput, low temperature tungsten deposition process is presented. Excellent step coverage is obtained because of the low temperature and high…”
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Conference Proceeding -
5
Characterization and implementation of self-aligned TiSi sub(2) in submicrometer CMOS technology
Published in IEEE transactions on electron devices (01-01-1991)“…Characterization and process implementation of a self-aligned TiSi sub(2) in a submicrometer CMOS process are presented. The effects of different in situ…”
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Journal Article -
6
Characterization and implementation of self-alignedTiSi(2) in submicrometer CMOS technology
Published in IEEE transactions on electron devices (01-01-1991)“…Characterization and process implementation of a self-aligned TiSi (2) in a submicrometer CMOS process are presented. The effects of different in situ sputter…”
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Journal Article -
7
Characterization and implementation of self-aligned TiSi2 in submicrometer CMOS technology
Published in IEEE transactions on electron devices (1991)Get full text
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8
Drachentöter in Ton
Published in Archäologie in Deutschland (01-12-2014)Get full text
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Lehre und Simulation: Methoden, Anforderungen, Evaluation und Visionen
Published in Der Anaesthesist (01-01-2007)Get full text
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Solitärbienen als Schädlinge an Mauerwerk
Published in Journal of pest science (01-05-1962)Get full text
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Töpferei in der Vorstadt
Published in Archäologie in Deutschland (01-05-2008)Get full text
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Entdeckungen am Lutherhaus
Published in Archäologie in Deutschland (01-09-2005)Get full text
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Burg und Schloss
Published in Archäologie in Deutschland (01-03-2002)Get full text
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Gräflicher Wohnbau
Published in Archäologie in Deutschland (01-10-2001)Get full text
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Einen Hügel braucht die Burg
Published in Archäologie in Deutschland (01-07-1998)Get full text
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Einblicke ins mittelalterliche Zeitz
Published in Archäologie in Deutschland (01-10-1996)Get full text
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Aktuelles | aus der Landesarchäologie
Published in Archäologie in Deutschland (01-06-2017)Get full text
Magazine Article -
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The carotid body after irritation
Published in Verhandlungen der Deutschen Gesellschaft fur Pathologie (1967)Get more information
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