Search Results - "Roede, H"

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  1. 1

    Clustertool optimization through scheduling rules by Lemmen, B., Van Campen, E.J.J., Roede, H., Rooda, J.E.

    “…Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper,…”
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    Conference Proceeding
  2. 2

    Characterization and implementation of self-aligned TiSi/sub 2/ in submicrometer CMOS technology by Parekh, N.S., Roede, H., Bos, A.A., Jonkers, A.G.M., Verhaar, R.D.J.

    Published in IEEE transactions on electron devices (01-01-1991)
    “…Characterization and process implementation of a self-aligned TiSi/sub 2/ in a submicrometer CMOS process are presented. The effects of different in situ…”
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    Journal Article
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    High-throughput low temperature tungsten deposition process for 0.25 /spl mu/m technology by Elst, W., Van Zomeren, A., Berenbaum, D., Roede, H., Schmitz, J., Ellwanger, R.

    “…A new high-throughput, low temperature tungsten deposition process is presented. Excellent step coverage is obtained because of the low temperature and high…”
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    Conference Proceeding
  5. 5

    Characterization and implementation of self-aligned TiSi sub(2) in submicrometer CMOS technology by Parekh, N S, Roede, H, Bos, A A, Jonkers, A G M, Verhaar, R D J

    Published in IEEE transactions on electron devices (01-01-1991)
    “…Characterization and process implementation of a self-aligned TiSi sub(2) in a submicrometer CMOS process are presented. The effects of different in situ…”
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    Journal Article
  6. 6

    Characterization and implementation of self-alignedTiSi(2) in submicrometer CMOS technology by Parekh, N S, Roede, H, Bos, A A, Jonkers, A G M, Verhaar, R D J

    Published in IEEE transactions on electron devices (01-01-1991)
    “…Characterization and process implementation of a self-aligned TiSi (2) in a submicrometer CMOS process are presented. The effects of different in situ sputter…”
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    Journal Article
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    Keller und Turm by Rode, H.

    Published in Archäologie in Deutschland (01-09-2003)
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    Magazine Article
  14. 14

    Noch mehr Markt by Rode, H.

    Published in Archäologie in Deutschland (01-01-2003)
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    Magazine Article
  15. 15

    Burg und Schloss by Rode, H.

    Published in Archäologie in Deutschland (01-03-2002)
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    Magazine Article
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