Search Results - "Riessen, G.V."

Spectroscopic ellipsometry of TaNx and VN films by Mistrik, J., Takahashi, K., Antos, R., Aoyama, M., Yamaguchi, T., Anma, Y., Fukuda, Y., Takeyama, M.B., Noya, A., Jiang, Z.-T., Thurgate, S.M., Riessen, G.V.

Get full text

Spectroscopic ellipsometry of TaN x and VN films by Mistrik, J., Takahashi, K., Antos, R., Aoyama, M., Yamaguchi, T., Anma, Y., Fukuda, Y., Takeyama, M.B., Noya, A., Jiang, Z.-T., Thurgate, S.M., Riessen, G.V.

“…We report on spectro-ellipsometric investigations of reactively sputtered tantalum nitride (TaN x /SiO 2) and vanadium nitride (VN/Si) films. Several TaN x…”
Get full text