Search Results - "Reece, Ronald"
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Damage control of ion implantation for advanced doping process by using in-situ temperature control
Published in Materials science in semiconductor processing (01-10-2020)“…Most silicon nano-devices use ion implantation doping for electric characteristics due to precise control of concentration and location of the dopants. A…”
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Journal Article -
2
Silicon damage control through the use of aromatic hydrocarbon ion implantation
Published in Materials science in semiconductor processing (01-12-2020)“…The continuous shrinking of transistor devices calls for precise doping profile control. Generally, monomer carbon (C+) is implanted at doses too low to…”
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Journal Article -
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Trichophyton mentagrophytes Spores Differ From Mycelia in Their Ability to Induce Pustules and Activate Complement
Published in Journal of investigative dermatology (01-12-1986)“…To determine whether the morphology of dermatophytes plays a role in the clinical manifestation of dermatophytosis, we isolated spores and mycelia from…”
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Journal Article -
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Super Activation of Highly Surface Segregated Dopants in High Ge Content SiGe Obtained by Melt UV Laser Annealing
Published in 2018 22nd International Conference on Ion Implantation Technology (IIT) (01-09-2018)“…Activation of surface segregated dopants above the solid solubility limit in a high Ge content SiGe substrate has been demonstrated by nanosecond melt UV laser…”
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Conference Proceeding -
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Impact of solidification velocity on activation of Ga, In, and Al segregated in high Ge content SiGe by UV melt laser anneal
Published in 2019 Electron Devices Technology and Manufacturing Conference (EDTM) (01-03-2019)“…A possible effect of solidification velocity on activation of surface segregated Ga, In, and Al in high Ge content SiGe after UV melt laser anneal has been…”
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Conference Proceeding -
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Charge control for high-current ion implant
Published in Solid state technology (01-06-1997)Get full text
Magazine Article -
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Channeling effects and quad chain implantation process optimization for low energy boron ions
Published in Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on (2002)“…The results of low energy boron implantation on a batch process ion implanter are presented showing that a channeling may play an important role and have an…”
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Conference Proceeding