Search Results - "Rastegar, Ali J"

Review: Semiconductor Piezoresistance for Microsystems by Barlian, A. Alvin, Park, Woo-Tae, Mallon, Joseph R., Rastegar, Ali J., Pruitt, Beth L.

“…Piezoresistive sensors are among the earliest micromachined silicon devices. The need for smaller, less expensive, higher performance sensors helped drive…”
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Piezoresistive Cantilever Performance-Part II: Optimization by Sung-Jin Park, Doll, J.C., Rastegar, A.J., Pruitt, B.L.

“…Piezoresistive silicon cantilevers fabricated by ion implantation are frequently used for force, displacement, and chemical sensors due to their low cost and…”
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Piezoresistive Cantilever PerformanceaPart II: Optimization by Park, Sung-Jin, Doll, Joseph C, Rastegar, Ali J, Pruitt, Beth L

“…Piezoresistive silicon cantilevers fabricated by ion implantation are frequently used for force, displacement, and chemical sensors due to their low cost and…”
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