Search Results - "Rasia, L.A."
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Piezoresistive response of ITO films deposited at room temperature by magnetron sputtering
Published in Journal of materials science (01-08-2010)“…Indium tin oxide (ITO) thin films have been deposited on (100) Si substrates by RF magnetron sputtering from a compact target (90% In 2 O 3 –10% SnO 2 in…”
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