Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India

JINST 9 (2014) P06008 This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor on a four-inch wafer. After fin...

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Bibliographic Details
Main Authors:	Aziz, T, Chendvankar, S. R, Mohanty, G. B, Patil, M. R, Rao, K. K, Rani, Y. R, Rao, Y. P. P, Behnamian, H, Mersi, S, Naseri, M
Format:	Journal Article
Language:	English
Published:	08-05-2014
Subjects:	Physics - High Energy Physics - Experiment Physics - Instrumentation and Detectors
Online Access:	Get full text
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Summary:	JINST 9 (2014) P06008 This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor on a four-inch wafer. After finding suitable test procedures for characterizing these AC coupled sensors, we have fine-tuned various process parameters in order to produce sensors with the desired specifications.
DOI:	10.48550/arxiv.1402.2406