Search Results - "Raja, Laxminarayan L."
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1
Modeling of Mode Transition Behavior in Argon Microhollow Cathode Discharges
Published in Plasma processes and polymers (15-05-2009)“…A self‐consistent, non‐equilibrium plasma discharge model is used to describe physical mechanisms and understand different operating regimes of a MHCD. The…”
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2
Relationship between center-peaked plasma density profiles and harmonic electromagnetic waves in very high frequency capacitively coupled plasma reactors
Published in Japanese Journal of Applied Physics (01-03-2014)“…An understanding of the factors that control radial plasma uniformity in very high frequency (VHF) capacitively coupled plasma (CCP) sources is important for…”
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3
Influence of field emission on microwave microdischarges
Published in High voltage (01-04-2016)“…An instability in the stable operation of microdischarges sustained at microwave frequencies, is investigated by a self-consistent one-dimensional…”
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4
Computational study of cold atmospheric nanosecond pulsed helium plasma jet in air
Published in Applied physics letters (12-09-2011)“…A luminous plasma jet is produced when helium gas issuing into atmospheric pressure ambient air is excited by high voltage nanosecond pulsing of a dielectric…”
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5
A plasma–vacuum interface tracking algorithm for magnetohydrodynamic simulations of coaxial plasma accelerators
Published in Journal of computational physics (01-08-2018)“…The resistive Magneto-hydrodynamic (MHD) model describes the behavior of a strongly ionized plasma in the presence of external electric and magnetic fields…”
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6
A stable finite-difference time-domain scheme for local time-stepping on an adaptive mesh
Published in Journal of computational physics (01-10-2019)“…Physical effects driven by strong electromagnetic fields often occur in regions of highly localized fields on a scattering object. Unfortunately, the most…”
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7
Investigation of the significance of excited species in wave-heated dense non-ideal microplasmas using particle-in-cell Monte Carlo-collision modeling
Published in AIP advances (01-06-2023)“…A computational model for the interaction of a high-pressure microplasma with an electromagnetic wave is presented. A one-dimensional particle-in-cell Monte…”
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8
Modeling of a Dielectric-Barrier Discharge-Based Cold Plasma Combustion Ignition System
Published in IEEE transactions on plasma science (01-01-2019)“…We present a computational modeling study of plasma phenomena in a dielectric-barrier discharge (DBD) for automotive combustion ignition applications. The…”
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9
Effects of flow collisionality on ELM replication in plasma guns
Published in Fusion engineering and design (01-07-2019)“…•Plasma gun devices can replicate type I ELM heat fluxes of 1–10 GW/m2.•They feature significantly higher flow collisionality than fusion conditions.•Schlieren…”
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10
Measurements and modeling of the impact of radical recombination on silicon nitride growth in microwave plasma assisted atomic layer deposition
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-01-2018)“…High material quality silicon nitride thin film deposition by plasma enhanced atomic layer deposition (PEALD) is necessary for many advanced semiconductor…”
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11
Computational study of capacitively coupled high-pressure glow discharges in helium
Published in IEEE transactions on plasma science (01-08-2003)“…The structure of a capacitively coupled high-pressure glow (HPG) discharge in high-purity helium is investigated using a detailed one-dimensional modeling…”
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12
Cyclic Self-Limiting Etching of Organic Polymers
Published in ACS applied polymer materials (09-07-2021)“…Organic polymer materials play a key role in today’s semiconductor manufacturing industry. They are used to pattern structures and form templates for complex…”
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13
Simulation of Chemically Reacting Flow in Plasma Native Oxide Cleaning Process
Published in 2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (01-09-2019)“…A plasma native oxide cleaning process is widely used on the semiconductor production line to remove oxide impurities on silicon surfaces of an wafer. In this…”
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Conference Proceeding -
14
Cathode-sheath driven low-speed aerodynamic flow actuation using direct-current surface glow discharges
Published in Journal of electrostatics (01-10-2010)“…Flow actuation by a continuous/pulsed, direct-current (DC) surface glow discharge is explored. The discharge comprises an array of pin electrode pairs flush…”
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15
A critical evaluation of Navier–Stokes, boundary-layer, and plug-flow models of the flow and chemistry in a catalytic-combustion monolith
Published in Catalysis today (10-06-2000)“…The objective of this paper is to evaluate three alternative formulations for simulating the steady-state flow and chemistry in a honeycomb channel for…”
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16
Development of a Gas-Fed Plasma Source for Pulsed High-Density Plasma/Material Interaction Studies
Published in IEEE transactions on plasma science (01-10-2014)“…A gas-fed capillary plasma source has been developed to study plasma-surface interactions under pulsed high pressure arc conditions, without the use of an…”
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17
Role of trace impurities in large-volume noble gas atmospheric-pressure glow discharges
Published in Applied physics letters (29-07-2002)“…A computational study of capacitively coupled atmospheric-pressure glow discharges in high-purity helium is presented, and the role of trace impurities in such…”
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18
Microdischarge-assisted ignition of dielectric-barrier high-pressure glow discharges
Published in Applied physics letters (09-01-2006)“…The ignition characteristics of dielectric-barrier high-pressure glow (DB-HPG) discharges in the presence of dc microdischarges are studied for pure helium and…”
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19
Computational modeling of a surfatron mode microwave plasma in NH3/N2 for remote radical generation in a silicon native oxide cleaning process
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-05-2024)“…Plasma-produced NxHy radicals facilitate the removal of native oxide layers in a semiconductor wafer surface. A remote microwave excited plasma with a NH3–N2…”
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20
A plasma–vacuum interface tracking algorithm for magnetohydrodynamic simulations of coaxial plasma accelerators
Published in Journal of computational physics (01-08-2018)Get full text
Journal Article