Chemical vapor deposition of entropy-stabilized rock-salt type oxide thin films

•High-entropy oxide (MgCONiCuZn)O synthesized by CVD.•The entropy-stabilized phase is obtained after annealing at 950 °C.•The lattice parameters are close to those of the same material synthesized by solid state or PVD. Here we present the first synthesis of a multi-cationic oxide (MgCoNiCuZn)O by p...

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Bibliographic Details
Published in:	Materials letters Vol. 337; p. 133955
Main Authors:	Raison, Antoine, Prud'homme, Nathalie, Wang, Wu, Dragoe, Diana, Dragoe, Nita
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 15-04-2023
Subjects:	Chemical vapor deposition High-entropy oxide Thin film Chemical vapor deposition High-entropy oxide Thin film
Online Access:	Get full text
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Summary:	•High-entropy oxide (MgCONiCuZn)O synthesized by CVD.•The entropy-stabilized phase is obtained after annealing at 950 °C.•The lattice parameters are close to those of the same material synthesized by solid state or PVD. Here we present the first synthesis of a multi-cationic oxide (MgCoNiCuZn)O by pulsed liquid injection chemical vapor deposition. The synthesis is performed between 400 °C and 550 °C from five metal–organic precursors simultaneously solubilized in dimethoxyethane (DME). The microstructure of the material was studied using HRTEM with HAADF, SEM, EDS, XPS and XRD before and after annealing.
ISSN:	0167-577X 1873-4979
DOI:	10.1016/j.matlet.2023.133955