Spectroscopic ellipsometry study of N+ ion-implanted ethylene–norbornene films

The optical properties of 150keV N+ implanted ethylene–norbornene (TOPAS 6017S-04) copolymer were investigated using phase modulated spectroscopic ellipsometry (PMSE) and ultraviolet–visible (UV–Vis) spectroscopy in the ranges of 0.6–6.5eV and of 1.5–6.2eV, respectively. The single-effective-oscilla...

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Bibliographic Details
Published in:	Radiation physics and chemistry (Oxford, England : 1993) Vol. 98; pp. 7 - 13
Main Authors:	Šiljegović, M., Kačarević-Popović, Z.M., Stchakovsky, M., Radosavljević, A.N., Korica, S., Novaković, M., Popović, M.
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 01-05-2014
Subjects:	Ellipsometry Ethylene–norbornene Ion irradiation Single effective oscillator UV–Vis Ion irradiation UV–Vis Ethylene–norbornene Ellipsometry Single effective oscillator
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Summary:	The optical properties of 150keV N+ implanted ethylene–norbornene (TOPAS 6017S-04) copolymer were investigated using phase modulated spectroscopic ellipsometry (PMSE) and ultraviolet–visible (UV–Vis) spectroscopy in the ranges of 0.6–6.5eV and of 1.5–6.2eV, respectively. The single-effective-oscillator model was used to fit the calculated data to the experimental ellipsometric spectra. The results show that the oscillator and dispersion energies decrease with increasing ion fluence up to 1015cm−2, and then these parameters increase with further fluence increasing. Analysis of the UV–Vis absorption spectra revealed the presence of indirect electronic transitions with the band gap energy in the range of 1.3 to 2.8eV. It was found that both the band gap energy and the energy width of the distribution of localized band tail states decrease, while the values of Tauc coefficient increase with increasing the ion fluence. From the ellipsometric data we found that the real part of the dielectric function increased about 7% after irradiation with 1015cm−2, and decreased about 10% in samples modified with 1016cm−2. •Effect of N+ irradiation on optical properties of TOPAS 6017S-04 copolymer.•Changes in index of refraction and dielectric function in N+ irradiated TOPAS.•Optical energy gap and Urbach energy decrease with increasing ion fluence.•Oscillator and dispersion energies decrease with increasing ion fluence to 1015cm−2.
ISSN:	0969-806X 1879-0895
DOI:	10.1016/j.radphyschem.2013.12.023