Arrays of addressable contactless optical microshutters

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Bibliographic Details
Published in:	Microsystem technologies : sensors, actuators, systems integration Vol. 11; no. 11; pp. 1171 - 1175
Main Authors:	GONSETH, Stéphan, PERREGAUX, Grégoire, FROSIO, Roberto, THIEBAUD, Jean-Philippe, VUILLOMENET, Henri, DEBERGH, Patrick, UNDERBJERG, Carsten, RAVNKILDE, Jan Tue, HENNINGSEN, Henning
Format:	Journal Article
Language:	English
Published:	Berlin Springer 01-10-2005
Subjects:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics. Optical fibers and wave guides Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Optical and optoelectronic circuits Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Integrated optics Hermetic sealing Stiction Micromachining Rupture Durability Shutter Obturator Experimental study Adhesion Optical arrays Short circuit Lifetime Microelectromechanical device
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ISSN:	0946-7076 1432-1858
DOI:	10.1007/s00542-005-0583-8