Search Results - "Quemere, Patrick"

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    Rigorous Model-Based Mask Data Preparation Algorithm Applied to Grayscale Lithography for the Patterning at the Micrometer Scale by Chevalier, Pierre, Quemere, Patrick, Berard-Bergery, Sebastien, Henry, Jean-Baptist, Beylier, Charlotte, Vaillant, Jerome

    Published in Journal of microelectromechanical systems (01-06-2021)
    “…Grayscale mask creation has for the most part been restricted to over-simplified optical and resist models usually based on a contrast curve approach. While…”
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    Journal Article
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    A new multi-domain/multi-resolution method for large-eddy simulation by Quéméré, Patrick, Sagaut, Pierre, Couailler, Vincent

    “…A new multi‐domain/multi‐resolution method is presented in the framework of the large‐eddy simulation (LES). The proposed treatment at the interfaces is…”
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