Search Results - "Pummara, W."
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Fabrication and control of thin-film aluminum microheater and nickel temperature sensor
Published in The 8th Electrical Engineering/ Electronics, Computer, Telecommunications and Information Technology (ECTI) Association of Thailand - Conference 2011 (01-05-2011)“…A thin film aluminum microheater and nickel temperature sensor are designed and fabricated by Micro Electro-Mechanical Systems (MEMS) for low temperature…”
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Conference Proceeding
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Design and fabrication of thin-film aluminum microheater and nickel temperature sensor
Published in 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (01-03-2012)“…This paper presents development of a thin film aluminum microheater and a nickel temperature sensor for low temperature applications by using…”
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Conference Proceeding -
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Fabrication of low-cost plastic micromolds for microfluidic systems using X-ray LIGA
Published in 2014 11th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON) (01-05-2014)“…This paper presents low-cost plastic micromolds fabricated by X-ray LIGA technology. High aspect ratio microstructures are constructed by X-ray lithography…”
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Conference Proceeding -
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Reproduction of microparts based on standard X-ray LIGA processes for mass production
Published in 2012 9th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (01-05-2012)“…This paper presents a rapid reproduction method of microparts based on the standard X-ray LIGA processes. The SU-8 master mold of microparts is fabricated by…”
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Conference Proceeding