Search Results - "Puggini, Luca"

  • Showing 1 - 8 results of 8
Refine Results
  1. 1

    Forward Selection Component Analysis: Algorithms and Applications by Puggini, Luca, McLoone, Sean

    “…Principal Component Analysis (PCA) is a powerful and widely used tool for dimensionality reduction. However, the principal components generated are linear…”
    Get full text
    Journal Article
  2. 2

    An enhanced variable selection and Isolation Forest based methodology for anomaly detection with OES data by Puggini, Luca, McLoone, Seán

    “…The development of efficient and interpretable anomaly detection systems is fundamental to keeping production costs low, and is an active area of research in…”
    Get full text
    Journal Article
  3. 3
  4. 4
  5. 5

    Computational Intelligence Techniques for OES Data Analysis by Puggini, Luca

    Published 01-01-2017
    “…Semiconductor manufacturers are forced by market demand to continually deliver lower cost and faster devices. This results in complex industrial processes…”
    Get full text
    Dissertation
  6. 6

    Extreme learning machines for virtual metrology and etch rate prediction by Puggini, Luca, McLoone, Sean

    “…Virtual metrology (VM) aims to predict metrology values using sensor data from production equipment and physical metrology values of preceding samples. VM is a…”
    Get full text
    Conference Proceeding
  7. 7

    Nonlinear Forward Selection Component Analysis for optical emission spectroscopy wavelength selection by Puggini, Luca, McLoone, Sean

    “…Semiconductor manufacturers are increasingly reliant on optical emission spectroscopy (OES) to source information on plasma characteristics and process change…”
    Get full text
    Conference Proceeding
  8. 8

    Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction by Puggini, L, Doyle, J, McLoone, S

    “…Semiconductor manufactures are increasing reliant on optical emission spectroscopy (OES) to source information on plasma characteristics and process change…”
    Get full text
    Conference Proceeding