Search Results - "Premkumar, Peter Antony"

Buried Power Rail Integration With FinFETs for Ultimate CMOS Scaling by Gupta, Anshul, Pedreira, Olalla Varela, Arutchelvan, Goutham, Zahedmanesh, Houman, Devriendt, Katia, Mertens, Hans, Tao, Zheng, Ritzenthaler, Romain, Wang, Shouhua, Radisic, Dunja, Kenis, Karine, Teugels, Lieve, Sebai, Farid, Lorant, Christophe, Jourdan, Nicolas, Chan, Boon Teik, Subramanian, Sujith, Schleicher, Filip, Hopf, Toby, Peter, Antony Premkumar, Rassoul, Nouredine, Debruyn, Haroen, Demonie, Ingrid, Siew, Yong Kong, Chiarella, Thomas, Briggs, Basoene, Zhou, Xiuju, Rosseel, Erik, De Keersgieter, An, Capogreco, Elena, Litta, Eugenio Dentoni, Boccardi, Guillaume, Baudot, Sylvain, Mannaert, Geert, Bontemps, Noemie, Sepulveda, A., Mertens, Sofie, Kim, Min-Soo, Dupuy, Emmanuel, Vandersmissen, Kevin, Paolillo, Sara, Yakimets, Dmitry, Chehab, Bilal, Favia, Paola, Drijbooms, Christel, Cousserier, Joris, Jaysankar, Manoj, Lazzarino, Frederic, Morin, Pierre, Altamirano, Efrain, Mitard, Jerome, Wilson, Christopher J., Holsteyns, Frank, Boemmels, Juergen, Demuynck, Steven, Tokei, Zsolt, Horiguchi, Naoto

“…Buried power rail (BPR) is a key scaling booster for CMOS extension beyond the 5-nm node. This work demonstrates, for the first time, the integration of…”
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Crystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer deposition by Rampelberg, Geert, Deduytsche, Davy, De Schutter, Bob, Premkumar, Peter Antony, Toeller, Michael, Schaekers, Marc, Martens, Koen, Radu, Iuliana, Detavernier, Christophe

“…Crystalline vanadium dioxide (VO2) thin films were prepared by annealing amorphous VO2 films which were deposited by atomic layer deposition on a SiO2…”
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Effect of Solvent on the Growth of Co and Co2C Using Pulsed-Spray Evaporation Chemical Vapor Deposition by Premkumar, Peter Antony, Turchanin, Andrey, Bahlawane, Naoufal

“…Cobalt and cobalt carbide films were obtained using chemical vapor deposition (CVD) at low pressure in a hydrogen-free atmosphere at temperatures below 300 °C…”
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Nickel and Nickel-Based Nanoalloy Thin Films from Alcohol-Assisted Chemical Vapor Deposition by Bahlawane, Naoufal, Premkumar, Peter Antony, Tian, Zhenyu, Hong, Xin, Qi, Fei, Kohse-Höinghaus, Katharina

“…The growth of nickel and nickel-based alloys was investigated using the pulsed-spray evaporation (PSE) CVD process in hydrogen-free atmosphere. This process…”
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Roughness evolution during the atomic layer deposition of metal oxides by Premkumar, Peter Antony, Delabie, Annelies, Rodriguez, Leonard N. J., Moussa, Alain, Adelmann, Christoph

“…The evolution of the surface roughness during the atomic-layer deposition (ALD) of Al2O3, NiO, and HfO2 was studied by atomic-force microscopy and nonspecular…”
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Smooth and Self-Similar SiO2-like Films on Polymers Synthesized in Roll-to-Roll Atmospheric Pressure-PECVD for Gas Diffusion Barrier Applications by Premkumar, Peter Antony, Starostin, Sergey A., Creatore, Mariadriana, de Vries, Hindrik, Paffen, Roger M. J., Koenraad, Paul M., van de Sanden, Mauritius C. M.

“…SiO2‐like layers deposited by means of the developed atmospheric pressure glow‐like DBD assisted CVD technology exhibit remarkable film properties, reported…”
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High Quality SiO2-like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis by Premkumar, Peter Antony, Starostin, Sergey A., de Vries, Hindrik, Paffen, Roger M. J., Creatore, Mariadriana, Eijkemans, Tom J., Koenraad, Paul M., de Sanden, Mauritius C. M. van

“…This work reports on the main competing processes and their contribution to the properties of SiO2 layers on polymers in large area AP‐PE‐CVD from…”
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Surface Dynamics of SiO2-like Films on Polymers Grown by DBD Assisted CVD at Atmospheric Pressure by Premkumar, Peter Antony, Starostin, Sergey A., de Vries, Hindrik, Creatore, Mariadriana, Koenraad, Paul M., MacDonald, William A., van de Sanden, Mauritius C. M.

“…The development of the morphology and surface roughness of amorphous SiO2‐like films, on various polymeric substrates was analyzed by atomic force microscopy…”
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Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes by Peter, Antony Premkumar, Tomomi, Takayama, Taishi, Ebisudani, Eiichiro, Shiba, Sepulveda, Alfonso, Blanquart, Timothee, Kimura, Yosuke, Subramanian, Sujith, Baudot, Sylvain, Basoene, Briggs, Gupta, Anshul, Veloso, Anabela, Capogreco, Elena, Mertens, Hans, Meersschaut, Johan, Conard, Thierry, Dara, Praveen, Geypen, Jef, Martinez, Gerardo, Batuk, Dmitry, Demuynck, Steven, Morin, Pierre

“…In this study, we explored the key properties and functionalities of plasma enhanced atomic layer deposition (PEALD) SiNx films, synthesized using different…”
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Phase Formation and Morphology of Nickel Silicide Thin Films Synthesized by Catalyzed Chemical Vapor Reaction of Nickel with Silane by Peter, Antony Premkumar, Meersschaut, Johan, Richard, Olivier, Moussa, Alain, Steenbergen, Johnny, Schaekers, Marc, Tőkei, Zsolt, Van Elshocht, Sven, Adelmann, Christoph

“…The synthesis of nickel silicide thin films via a vapor–solid reaction has been studied by exposing thin (10 nm) Ni films to silane (SiH4). The crystalline…”
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Phase analysis and thermal stability of thin films synthesized via solid state reaction of Ni with Si sub(1 - x)Ge sub(x) substrate by Peter, Antony Premkumar, Witters, Thomas, Dutta, Shibesh, Hikavvy, Andriy, Vaesen, Inge, Elshocht, Sven Van, Schaekers, Marc

“…The products of the solid state reaction involving ultra-thin Ni film (6 nm) and Si sub(1 - x)Ge sub(x) layers (Ge 25 and 55 at.%), were analysed using sheet…”
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Phase analysis and thermal stability of thin films synthesized via solid state reaction of Ni with Si1−xGex substrate by Peter, Antony Premkumar, Witters, Thomas, Dutta, Shibesh, Hikavvy, Andriy, Vaesen, Inge, Van Elshocht, Sven, Schaekers, Marc

“…The products of the solid state reaction involving ultra-thin Ni film (6nm) and Si1−xGex layers (Ge 25 and 55at.%), were analysed using sheet resistance (Rs),…”
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Characterization of ultra-thin nickel–silicide films synthesized using the solid state reaction of Ni with an underlying Si:P substrate (P: 0.7 to 4.0%) by Peter, Antony Premkumar, Yu, Hao, Dutta, Shibesh, Rosseel, Erik, Van Elshocht, Sven, Paulussen, Kris, Moussa, A., Vaesan, Inge, Schaekers, Marc

“…The solid state reaction of an ultra-thin Ni film (6nm) with Si:P epi layers (P: 0.7 to 4.0%), grown on 300-mm Si wafers, is studied as a function of different…”
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Selective chemical vapor synthesis of Cu3Ge: Process optimization and film properties by Peter, Antony Premkumar, Carbonell, Laureen, Schaekers, Marc, Adelmann, Christoph, Meersschaut, Johan, Franquet, Alexis, Richard, Olivier, Bender, Hugo, Zsolt, Tokei, van Elshocht, Sven

“…We report on the synthesis of Cu3Ge films by exposing Cu films to germane (GeH4). The process window was established by investigating the influence of the GeH4…”
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Effect of Solvent on the Growth of Co and Co 2 C Using Pulsed-Spray Evaporation Chemical Vapor Deposition by Premkumar, Peter Antony, Turchanin, Andrey, Bahlawane, Naoufal

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Morphological Description of Ultra-Smooth Organo-Silicone Layers Synthesized Using Atmospheric Pressure Dielectric Barrier Discharge Assisted PECVD by Premkumar, Peter Antony, Starostin, Sergey A., de Vries, Hindrik, Creatore, Mariadriana, Koenraad, Paul M., van de Sanden, Mauritius C. M.

“…The SiOxCyHz layers synthesized by means of the atmospheric pressure glow‐like DBD assisted PECVD technology show remarkable planarizing film properties,…”
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Optical Characterization of Plasma-Deposited SiO2-Like Layers on Anisotropic Polymeric Substrates by Aresta, Gianfranco, Premkumar, Peter Antony, Starostin, Sergey A., de Vries, Hindrik, van de Sanden, Mauritius C. M., Creatore, Mariadriana

“…In this paper, the characterization of the optical anisotropy of poly(ethylene‐2,6‐naphthalate) (PEN) by means of Transmission Generalized Ellipsometry coupled…”
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Surface Dynamics of SiO 2 ‐like Films on Polymers Grown by DBD Assisted CVD at Atmospheric Pressure by Premkumar, Peter Antony, Starostin, Sergey A., de Vries, Hindrik, Creatore, Mariadriana, Koenraad, Paul M., MacDonald, William A., van de Sanden, Mauritius C. M.

“…Abstract The development of the morphology and surface roughness of amorphous SiO 2 ‐like films, on various polymeric substrates was analyzed by atomic force…”
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Surface Dynamics of SiO2-like Films on Polymers Grown by DBD Assisted CVD at Atmospheric Pressure: Cold Atmospheric Plasmas by PREMKUMAR, Peter Antony, STAROSTIN, Sergey A, DE VRIES, Hindrik, CREATORE, Mariadriana, KOENRAAD, Paul M, MACDONALD, William A, DE SANDEN, Mauritius C. M. Van

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Plasma Process. Polym. 9-10/2010 by Aresta, Gianfranco, Premkumar, Peter Antony, Starostin, Sergey A., de Vries, Hindrik, van de Sanden, Mauritius C. M., Creatore, Mariadriana

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