Search Results - "Premachandran, CS"
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Efficient Bidirectional protection structure for Plasma induced damage (PID) and Electrostatic discharge (ESD) for 3D IC Integration
Published in 2020 IEEE International Reliability Physics Symposium (IRPS) (01-04-2020)“…During metal/dielectric plasma processing for the back end of the line (BEOL), degradation of the transistor gate oxide may occur due to the plasma discharge…”
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Conference Proceeding -
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A Comprehensive Wafer Level Reliability Study on 65nm Silicon Interposer
Published in 2019 IEEE International Reliability Physics Symposium (IRPS) (01-03-2019)“…Stacking of chips vertically will reduce the interconnection resistance and as a result enhance data communication between chips. Memory chip to logic chip…”
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Conference Proceeding -
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Effect of passivation on frit glass bonding method for wafer level hermetic sealing on MEMS devices
Published in Proceedings of the 5th Electronics Packaging Technology Conference (EPTC 2003) (2003)“…A wafer level hermetic package has been developed for micro-electronics mechanical system (MEMS) applications by wafer to wafer bonding method. A cap wafer,…”
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Conference Proceeding -
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Finite element simulation of the fatigue behaviour of a MEMS package
Published in 4th Electronics Packaging Technology Conference, 2002 (2002)“…Finite element analysis (FEA) was carried out to analyse the reliability of the solder sealing of a ceramic based vacuum package under the combined effect of…”
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Conference Proceeding -
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Pressure and depth dependence of sidewall roughness of polymer optical waveguides during reactive ion etching
Published in Proceedings of 6th Electronics Packaging Technology Conference (EPTC 2004) (IEEE Cat. No.04EX971) (2004)“…Sidewall roughness (SWR) of fluorinated polyether waveguides fabricated using reactive ion etching in pure oxygen gas was directly measured using atomic force…”
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Conference Proceeding -
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Design & development of a new thermally stable high vacuum IR bolometer package
Published in 53rd Electronic Components and Technology Conference, 2003. Proceedings (2003)Get full text
Conference Proceeding