Search Results - "Potard, Pascale"

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    Moisture Influence on Reliability and Electrical Characteristics of SiOC:H Low-k Dielectric Material by Vidal-Dho, Matthias, Hubert, Quentin, Gonon, Patrice, Pelissier, Bernard, Fornara, Pascal, Escales, Jean-Philippe, Potard, Pascale, Moragues, Jean-Michel, Ogier, Jean-Luc

    “…This paper presents an in depth study of the moisture influence on reliability and electrical characteristics of SiOC:H low-κ dielectric material. Firstly,…”
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    Conference Proceeding
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