Search Results - "Polushkin, E. A."

Hydrogen Plasma under Conditions of Electron-Cyclotron Resonance in Microelectronics Technology by Polushkin, E. A., Nefed’ev, S. V., Koval’chuk, A. V., Soltanovich, O. A., Shapoval, S. Yu

“…This paper presents the results of hydrogen electron-cyclotron resonance (ECR) plasma in microelectronics technology. Its effect on the radiation resistance of…”
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3D Femtosecond Laser Submicron Lithography as a Way of Fabricating Spiral Phase Plates for Forming Photon Beams with Orbital Angular Momentum by Demenev, A. A., Kovalchuk, A. V., Polushkin, E. A., Shapoval, S. Yu

“…A spiral phase plate with a topological charge of 1 is fabricated via 3D femtosecond laser submicron lithography. An optical scheme based on a Michelson…”
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Detector for terahertz applications based on a serpentine array of integrated GaAs/InGaAs/AlGaAs-field-effect transistors by Yermolaev, D. M., Khmyrova, I., Polushkin, E. A., Kovalchuk, A. V., Gavrilenko, V. I., Maremyanin, K. V., Maleev, N. A., Ustinov, V. M., Zemlyakov, V. E., Bespalov, V. A., Egorkin, V. I., Popov, V. V., Shapoval, S. Yu

“…Performance of a detector based on AlGaAs/InGaAs/GaAs-material system was studied. The detector was comprised of large serpentine array of high-electron…”
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