Angle selective backscattered electron contrast in the low-voltage scanning electron microscope: Simulation and experiment for polymers

Recently developed detectors can deliver high resolution and high contrast images of nanostructured carbon based materials in low voltage scanning electron microscopes (LVSEM) with beam deceleration. Monte Carlo Simulations are also used to predict under which exact imaging conditions purely composi...

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Bibliographic Details
Published in:	Ultramicroscopy Vol. 171; pp. 126 - 138
Main Authors:	Wan, Q., Masters, R.C., Lidzey, D., Abrams, K.J., Dapor, M., Plenderleith, R.A., Rimmer, S., Claeyssens, F., Rodenburg, C.
Format:	Journal Article
Language:	English
Published:	Netherlands Elsevier B.V 01-12-2016
Subjects:	Angle selective SEM Carbon Computer simulation Concentric back scattered detector Detectors Imaging Low-voltage scanning electron microscopy Materials selection Mathematical models Nanostructure Polymer Quantitative back-scattered imaging Scanning electron microscopy Quantitative back-scattered imaging Polymer Concentric back scattered detector Low-voltage scanning electron microscopy Angle selective SEM
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Summary:	Recently developed detectors can deliver high resolution and high contrast images of nanostructured carbon based materials in low voltage scanning electron microscopes (LVSEM) with beam deceleration. Monte Carlo Simulations are also used to predict under which exact imaging conditions purely compositional contrast can be obtained and optimised. This allows the prediction of the electron signal intensity in angle selective conditions for back-scattered electron (BSE) imaging in LVSEM and compares it to experimental signals. Angle selective detection with a concentric back scattered (CBS) detector is considered in the model in the absence and presence of a deceleration field, respectively. The validity of the model prediction for both cases was tested experimentally for amorphous C and Cu and applied to complex nanostructured carbon based materials, namely a Poly(N-isopropylacrylamide)/Poly(ethylene glycol) Diacrylate (PNIPAM/PEGDA) semi-interpenetration network (IPN) and a Poly(3-hexylthiophene-2,5-diyl) (P3HT) film, to map nano-scale composition and crystallinity distribution by avoiding experimental imaging conditions that lead to a mixed topographical and compositional contrast [Display omitted] •An optimised model for nano-scale analysis of beam sensitive materials by LVSEM.•Simulation and separation of composition and topography in a CBS detector.•Selective angle backscattered electron collection for mapping of polymers.
Bibliography:	ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23
ISSN:	0304-3991 1879-2723
DOI:	10.1016/j.ultramic.2016.09.006