Search Results - "Pinnow, C. U."
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Characteristics of an Oxygen Barrier Based on Bi-layered Ir
Published in Integrated ferroelectrics (01-01-2003)“…For high-density ferroelectric random access memory devices (FeRAMs) with capacitor over plug (COP) structure, oxygen diffusion barriers based on bi-layered Ir…”
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Journal Article -
2
Oxygen Diffusion Barriers for High-Density FeRAMs
Published in Integrated ferroelectrics (01-01-2002)“…For high-density ferroelectric random access memories (FeRAMs) with capacitor over plug (COP) structure, oxygen diffusion barriers have been investigated. This…”
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Journal Article -
3
Conductive bridging RAM (CBRAM): an emerging non-volatile memory technology scalable to sub 20nm
Published in IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest (2005)“…We report on the electrical characterisation of nanoscale conductive bridging memory cells, composed of a thin solid state electrolyte layer sandwiched between…”
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Conference Proceeding -
4
Nanocrystallization of amorphous-Ta40Si14N46 diffusion barrier thin films
Published in Applied physics letters (04-06-2001)“…The nanocrystallization process in thin amorphous-Ta40Si14N46 films, annealed in the range between 800 and 1000 °C for 1 h, is investigated by high-resolution…”
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5
Nanocrystallization of amorphous-Ta{sub 40}Si{sub 14}N{sub 46} diffusion barrier thin films
Published in Applied physics letters (04-06-2001)“…The nanocrystallization process in thin amorphous-Ta{sub 40}Si{sub 14}N{sub 46} films, annealed in the range between 800 and 1000{degree}C for 1 h, is…”
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Journal Article -
6
Emerging non-volatile memory technologies
Published in ESSCIRC 2004 - 29th European Solid-State Circuits Conference (IEEE Cat. No.03EX705) (2003)“…The concept, the status and the respective challenges of the emerging non-volatile memory technologies are described. After discussing the magneto-resistive…”
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Conference Proceeding -
7
Preparation and properties of dc-sputtered IrO 2 and Ir thin films for oxygen barrier applications in advanced memory technology
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-09-2001)“…IrO 2 and Ir thin films have been deposited by dc sputtering in Ar/O 2 - and pure Ar atmospheres, respectively. The microstructural characterization of the…”
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Journal Article -
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Preparation and properties of dc-sputtered IrO sub(2) and Ir thin films for oxygen barrier applications in advanced memory technology
Published in Journal of vacuum science & technology. B, Microelectronics processing and phenomena (01-01-2001)“…A study of properties and preparation of thin films of IrO sub(2) and Ir deposited by dc sputtering was made for oxygen barrier applications in advanced memory…”
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Journal Article