Phase transitions in ferroelectric ZrO2 thin films

Phase transitions in ferroelectric ZrO2 thin films

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Bibliographic Details
Published in:Materials science in semiconductor processing Vol. 172; p. 108102
Main Authors: Pereira, Rui M.P., Istrate, Marian C., Figueiras, Fábio G., Lenzi, Veniero, Silva, Bruna M., Benamara, Majdi, Romanyuk, Konstantin N., Ghica, Corneliu, Almeida, Bernardo G., Marques, Luís, Pereira, Mario, Silva, José P.B.
Format: Journal Article
Language:English
Published: 15-03-2024
Online Access:Get full text
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Description
ISSN:1369-8001
DOI:10.1016/j.mssp.2023.108102