Fabrication and Characterization of an Integrated Microsystem for Protein Preconcentration and Sensing

We report on a fabrication and packaging process for a microsystem consisting of a mass-based protein detector and a fully integrated preconcentrator. Preconcentration of protein is achieved by means of a nanofluidic concentrator (NC), which takes advantage of fast nonlinear electroosmotic flow near...

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Bibliographic Details
Published in:	Journal of microelectromechanical systems Vol. 20; no. 1; pp. 221 - 230
Main Authors:	Dextras, P, Payer, K R, Burg, T P, Wenjiang Shen, Ying-Chih Wang, Jongyoon Han, Manalis, S R
Format:	Journal Article
Language:	English
Published:	New York, NY IEEE 01-02-2011 Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Analytical chemistry Anodic bonding Applied fluid mechanics Applied sciences Bonding Density Devices Exact sciences and technology Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) glass frit bonding Instruments, apparatus, components and techniques common to several branches of physics and astronomy ion concentration polarization Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microchannel Micromechanical devices and systems Nanocomposites Nanomaterials Nanostructure Numerical control Packaging Physics Precision engineering, watch making preconcentration Proteins Resonant frequency semiconductor device packaging Silicon vacuum packaging wafer scale integration Encapsulation ion concentration polarization Electrokinetics Hollow body Cantilever beam Separation method semiconductor device packaging Electroosmosis Resonance frequency Electrodiffusion Nanofluidics Microelectromechanical device glass frit bonding Production process Transient response Resonator Anodic bonding preconcentration Measurement sensor Experimental study Protein Surface treatment vacuum packaging wafer scale integration Compatibility Non linear effect Nanotechnology Microfluidics Fluidics
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Summary:	We report on a fabrication and packaging process for a microsystem consisting of a mass-based protein detector and a fully integrated preconcentrator. Preconcentration of protein is achieved by means of a nanofluidic concentrator (NC), which takes advantage of fast nonlinear electroosmotic flow near a nanochannel-microchannel junction to concentrate charged molecules inside a volume of fluid on the order of 1 pL. Detection of preconcentrated protein samples is accomplished by passing them through a suspended microchannel resonator (SMR), which is a hollow resonant cantilever serially connected to the NC on the same device. The transit of a preconcentrated sample produces a transient shift in the cantilever's resonance frequency that is proportional to the density of the sample and, hence, the concentration of protein contained in it. A device containing both NC and SMR structures was produced using a novel fabrication process which simultaneously satisfies the separate packaging requirements of the two structures. The initial testing of this prototype device has demonstrated that the integrated SMR can accurately measure the concentration of a bovine serum albumin solution, that was preconcentrated using the integrated NC. Future improvements in the fabrication process will allow site-specific surface modification of the device and compatibility with separation methods, which will create opportunities for its application to immunoassays and universal detection.
Bibliography:	ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23
ISSN:	1057-7157 1941-0158
DOI:	10.1109/JMEMS.2010.2093563