Search Results - "Parks, H.G."
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VHDL-AMS Modeling of Total Ionizing Dose Radiation Effects on CMOS Mixed Signal Circuits
Published in IEEE transactions on nuclear science (01-08-2007)“…A hierarchical method for total dose effects simulation of large mixed signal circuits using VHDL-AMS is described. Simplified behavioral models (or…”
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SET tolerant CMOS comparator
Published in IEEE transactions on nuclear science (01-12-2004)“…A novel way to mitigate single event transients (SETs) in a comparator by using auto-zeroing techniques is presented. Two comparators, a folded cascode…”
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3
Hafnium or zirconium high-k fab cross-contamination issues
Published in IEEE transactions on semiconductor manufacturing (01-11-2004)“…Hf and Zr contamination during immersion in process solutions is most likely to occur in neutral and caustic solutions. Both Hf and Zr contamination are…”
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The effect of copper contamination on field overlap edges and perimeter junction leakage current
Published in IEEE transactions on semiconductor manufacturing (01-05-1998)“…This work demonstrates that copper contamination present on pre gate-oxidation silicon surfaces results in yield and reliability problems particularly at field…”
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5
Quantifying the impact of homogeneous metal contamination using test structure metrology and device modeling
Published in IEEE transactions on semiconductor manufacturing (01-08-1994)“…Deposition of metallic impurities from HF process solutions has been investigated experimentally and explained theoretically in a qualitative manner. The…”
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Effect of Deep-Level Defects on Surface Recombination Velocity at the Interface Between Silicon and Dielectric Films
Published in IEEE transactions on electron devices (01-04-2010)“…The surface recombination velocity (SRV) characteristic of deep-level defects at Si interfaces with dielectric thin films was obtained from conductance…”
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Bile flow and composition are modulated by intravenous glycine in an in vivo warm ischaemia reperfusion injury model
Published in Gut (01-04-2004)Get full text
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The influence of copper contamination on gate oxide integrity
Published in 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings (1997)“…It is shown that low levels of copper contamination present on pre-oxidation silicon surfaces significantly affect not only the area, but also the field…”
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Conference Proceeding -
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The effect of hafnium or zirconium contamination on MOS processes
Published in 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) (2002)“…Hf and Zr contamination during immersion in process solutions is most likely to occur in neutral or caustic solutions. Both Hf and Zr contamination are…”
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Conference Proceeding -
10
A model for outgassing of organic contamination from wafer carrier boxes
Published in 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) (2002)“…A thermal desorption apparatus has been developed to study the adsorption and desorption of organic contaminants on silicon wafers due to outgassing from…”
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Fast turn around post process yield enhancement for custom VLSI foundries
Published in IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop (1990)“…An effective fast-turnaround postprocess yield-enhancement methodology for custom VLSI which has been developed using a static random access memory (SRAM) and…”
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12
Multi-step process control and characterization of scanning probe lithography
Published in Applied physics. A, Materials science & processing (01-03-1998)Get full text
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The influence of the pre-anneal ambient on the gate oxide integrity effect of copper contamination
Published in 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072) (2000)“…Three sets of wafers, the first used as delivered, the second pre-annealed in oxygen and the third pre-annealed in nitrogen, were contaminated with copper…”
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Concept and initial feasibility of contamination TCAD by integration with commercial software
Published in 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) (1999)“…Flexible manufacturing of ICs depends on technology computer-aided design (TCAD) tools. As ICs scale, contamination effects become more significant. Metal ions…”
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The nature of defect size distributions in semiconductor processes
Published in IEEE/SEMI International Semiconductor Manufacturing Science Symposium (1989)“…The combination of a small static random access memory (SRAM) and a test element group (TEG) has been shown to be an effective yield monitor for VLSI. Defects…”
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The nature of defect size distributions in semiconductor processes
Published in IEEE/SEMI International Semiconductor Manufacturing Science Symposium (1989)“…Summary form only given. The combination of a small static random access memory (SRAM) and a test element group (TEG) has been shown to be an effective yield…”
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17
Total dose radiation effect simulations on a high-precision data acquisition system
Published in 2007 9th European Conference on Radiation and Its Effects on Components and Systems (01-09-2007)“…A novel method to evaluate total dose radiation response on large mixed signal circuits is described. The method is based on partly behavioral, partly…”
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Yield modeling from SRAM failure analysis
Published in International Conference on Microelectronic Test Structures (1990)“…Yield models based on Poisson, bose-Einstein, and binomial statistics are compared for a 1.25 mu m CMOS process. A mixed binomial yield model is shown to most…”
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Research accomplishments at the University of Arizona SEMATECH Center of Excellence for contamination/defect assessment and control
Published in IEEE transactions on semiconductor manufacturing (01-05-1993)“…The Arizona SEMATECH Center of Excellence (SCOE) was established in May of 1988, is funded by SEMATECH and contractually monitored by the Semiconductor…”
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Research accomplishments at the University of Arizona SEMATECH Center of Excellence for contamination/defect assessment and control
Published in [1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (1991)“…The Arizona SEMATECH Center of Excellence (SCOE) was established in May of 1988. The SCOE is engaged in research on a broad front to understand and control…”
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