Search Results - "Papasouliotis, George D."
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Growth and Implementation of Carbon-Doped AlGaN Layers for Enhancement-Mode HEMTs on 200 mm Si Substrates
Published in Journal of electronic materials (01-12-2016)“…We are reporting the growth of AlGaN based enhancement-mode high electron mobility transistors (HEMTs) on 200 mm silicon (111) substrates using a single wafer…”
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Stress engineering with AlN/GaN superlattices for epitaxial GaN on 200 mm silicon substrates using a single wafer rotating disk MOCVD reactor
Published in Journal of materials research (14-10-2015)“…We are reporting on stress engineering utilizing AlN/GaN superlattices (SLs) for epitaxy of GaN layers on 200 mm silicon substrates carried out in Veeco's…”
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Uniform growth of III-nitrides on 200mm silicon substrates using a single wafer rotating disk MOCVD reactor
Published in Physica status solidi. A, Applications and materials science (01-04-2016)“…We are reporting on the uniform growth of III-nitrides (AlN, GaN, and AlGaN layers) on 200mm silicon substrates using Veeco's Propel rotating disk, single…”
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Journal Article -
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Uniform growth of III-nitrides on 200 mm silicon substrates using a single wafer rotating disk MOCVD reactor
Published in Physica status solidi. A, Applications and materials science (01-04-2016)“…We are reporting on the uniform growth of III‐nitrides (AlN, GaN, and AlGaN layers) on 200 mm silicon substrates using Veeco's Propel rotating disk, single…”
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Experimental study of atmospheric pressure chemical vapor deposition of silicon carbide from methyltrichlorosilane
Published in Journal of materials research (01-08-1999)“…A comprehensive study of the chemical vapor deposition of SiC from methyltrichlorosilane at atmospheric pressure was conducted in this study; its main…”
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Kinetic investigation of the chemical vapor deposition of silicon carbide through thermal decomposition of methyltrichlorosilane
Published 01-01-1998“…A comprehensive investigation of the deposition kinetics of silicon carbide through the thermal decomposition of methyltrichlorosilane in hydrogen is the…”
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Dissertation -
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Advanced plasma doping technique for USJ
Published in 2009 International Workshop on Junction Technology (01-06-2009)“…SDE implants were carried out in a VIISta PLAD system using both p- and n-type dopant precursors. The advanced control features in the PLAD system allowed for…”
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Conference Proceeding