Search Results - "Pampillón, María Ángela"
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Thermal Assessment of AlGaN/GaN MOS-HEMTs on Si Substrate Using Gd2O3 as Gate Dielectric
Published in IEEE transactions on electron devices (01-07-2016)“…Thermal stability of AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors (MOS-HEMTs) and diodes using Gd 2 O 3 is investigated by means of…”
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Advanced Graphene-Based Transparent Conductive Electrodes for Photovoltaic Applications
Published in Micromachines (Basel) (17-06-2019)“…New architectures of transparent conductive electrodes (TCEs) incorporating graphene monolayers in different configurations have been explored with the aim to…”
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Electrical characterization of gadolinium oxide deposited by high pressure sputtering with in situ plasma oxidation
Published in Microelectronic engineering (01-09-2013)“…[Display omitted] •Gd2O3 obtained by high pressure sputtering from Gd target with plasma oxidation on Si.•We have obtained a high k dielectric with good…”
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High‑k Gate Stacks on Low Bandgap Tensile Strained Ge and GeSn Alloys for Field-Effect Transistors
Published in ACS applied materials & interfaces (14-01-2015)“…We present the epitaxial growth of Ge and Ge0.94Sn0.06 layers with 1.4% and 0.4% tensile strain, respectively, by reduced pressure chemical vapor deposition on…”
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Electrical characterization of gadolinium oxide deposited by high pressure sputtering with in situ plasma oxidation
Published 30-01-2024“…Microelectronic Engineering 109 (2013) 236-239 In this work, we characterized gadolinium oxide films deposited on silicon by high pressure sputtering with a…”
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Gadolinium scandate by high-pressure sputtering for future generations of high-k dielectrics
Published 29-01-2024“…Semiconductor Science Technology 28 (2013) 085004 Gd-rich gadolinium scandate (Gd2-xScxO3) was deposited by high-pressure sputtering on (100) silicon by…”
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Optimization of gadolinium oxide growth deposited on Si by high pressure sputtering
Published 29-01-2024“…Journal of Vacuum Science and Technology B 31 (2012) 01A103 High k gadolinium oxide thin layers were deposited on silicon by high-pressure sputtering (HPS). In…”
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Scavenging effect on plasma oxidized Gd$_2$O$_3$ grown by high pressure sputtering on Si and InP substrates
Published 29-01-2024“…Semiconductor Science and Technology 30 (2015) 035023 In this work, we analyze the scavenging effect of titanium gates on metal insulator semiconductor…”
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Optimization of scandium oxide growth by high pressure sputtering on silicon
Published 29-01-2024“…Thin Solid Films 526 (2012) 81-86 This work demonstrates the viability of scandium oxide deposition on silicon by means of high pressure sputtering. Deposition…”
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High-k gadolinium scandate on Si obtained by high pressure sputtering from metal targets and in-situ plasma oxidation
Published 29-01-2024“…Semiconductor Science and Technology 32 (2017) 035016 This article studies the physical and electrical behavior of Gd2-xScxO3 layers grown by high pressure…”
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Anomalous thermal oxidation of gadolinium thin films deposited on silicon by high pressure sputtering
Published 29-01-2024“…Microelectronic Engineering 88 (2011) 2991-2996 Thin gadolinium metallic layers were deposited by high-pressure sputtering in pure Ar atmosphere. Subsequently,…”
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High Pressure Sputtering For Kigh-k Dielectric Deposition. Is It Worth Trying?
Published 29-01-2024“…ECS Transactions, 61 (2) 27-39 (2014) Our research group studies the deposition of high permittivity dielectrics by a non-standard method: high-pressure…”
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Towards metal electrode interface scavenging of rare-earth scandates: A Sc2O3 and Gd2O3 study
Published 29-01-2024“…Microelectronic Engineering 88 (2011) 1357-1360 AmorphousGd2O3 and Sc2O3 thin films were deposited on Si by high-pressure sputtering (HPS). In order to reduce…”
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High permittivity gadolinium oxide deposited on indium phosphide by high-pressure sputtering without interface treatments
Published in Microelectronic engineering (01-09-2013)“…•Two-step high-pressure sputtering for Gd2O3 deposition on InP substrates.•Working MIS devices for all sputtering and plasma oxidation conditions.•High…”
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Thermal Assessment of AlGaN/GaN MOS-HEMTs on Si Substrate Using Gd sub(2)O sub(3) as Gate Dielectric
Published in IEEE transactions on electron devices (01-07-2016)“…Thermal stability of AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors (MOS-HEMTs) and diodes using Gd sub(2)O sub(3) is investigated by…”
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Thermal Assessment of AlGaN/GaN MOS-HEMTs on Si Substrate Using Gd 2 O 3 as Gate Dielectric
Published in IEEE transactions on electron devices (01-07-2016)Get full text
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