Search Results - "PALMETSHOFER, L"
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Optically active erbium centers in silicon
Published in Physical review. B, Condensed matter (15-07-1996)Get full text
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Range evaluation in SIMS depth profiles of Er-implantations in silicon
Published in Applied surface science (30-09-2005)“…In the last decade ion implantation of common dopants in silicon has been almost full characterised. However, data of inner transition elements are based on…”
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Journal Article Conference Proceeding -
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On the influence of hydrogen on the erbium-related luminescence in silicon
Published in Applied physics letters (28-07-2003)“…Erbium- and oxygen-doped silicon was additionally doped with hydrogen, using plasma-enhanced chemical vapor deposition. Samples treated with solid-phase…”
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4
On the environment of optically active Er in Si-electroluminescence devices
Published in Applied physics letters (16-02-1998)“…We report sharp, atomlike electroluminescence spectra close to 1.54 μm from a low-dose (3.5×1018 cm−3) erbium-implanted silicon light-emitting diode operating…”
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5
Dose-rate dependence of damage formation in Si by N implantation as determined from channeling profile measurements
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-01-2006)“…While the dose-rate effect of ion implantation in Si is well known, a quantitative description of the amount of damage as a function of dose-rate has only been…”
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6
Damage and polymerization by ion bombardment of C60
Published in Applied physics letters (01-08-1994)“…Sublimated C60 fullerite films have been implanted with 160−300 keV H, He, C, and Ar ions with doses ranging from 1×1012 to 5×1016 cm−2. Raman scattering…”
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Range of ion-implanted rare earth elements in Si and SiO2
Published in Materials science & engineering. B, Solid-state materials for advanced technology (24-04-2001)Get full text
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8
Multiscale approach for the analysis of channeling profile measurements of ion implantation damage
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-01-2005)“…Coupled binary collision and kinetic lattice Monte Carlo simulations are used to analyze 30keV B channeling profile measurements of damage from 30keV N…”
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9
Different Er centres in Si and their use for electroluminescent devices
Published in Journal of luminescence (01-12-1998)“…At low temperatures, Er in Si produces a big variety of spectra in the 1.5 μm region which can be identified by high-resolution spectroscopy as being due to…”
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10
On the local structure of optically active Er centers in Si
Published in Applied physics letters (23-01-1995)“…We report high resolution (<0.05 cm−1) photoluminescence (PL) spectra of erbium implanted float-zone (FZ) and Czochralski grown (CZ) silicon. We show that the…”
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1.5 μm infrared photoluminescence phenomena in Er-doped porous silicon
Published in Applied physics letters (25-01-1999)“…We analyze the photoluminescence (PL) in nanoporous Si (po-Si) doped with Er by electrochemical deposition and by spin-on doping. Two kinds of optically active…”
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12
Direct excitation spectroscopy of Er centers in porous silicon
Published in Applied physics letters (17-11-1997)“…We report direct excitation of optically active Er centers in porous Si. Excitation spectroscopy performed close to the intracenter I415/2→I411/2 and…”
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13
Low Z total reflection X-ray fluorescence analysis — challenges and answers
Published in Spectrochimica acta. Part B: Atomic spectroscopy (25-10-1999)“…Low Z elements, like C, O, ... Al are difficult to measure, due to the lack of suitable low-energy photons for efficient excitation using standard X-ray tubes,…”
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14
Room-temperature photoluminescence excitation spectroscopy of Er3+ ions in Er- and (Er+Yb)-doped SiO2 films
Published in Applied physics letters (04-10-1999)“…We apply photoluminescence excitation spectroscopy to study the efficiency of excitation at 960–990 nm of the 1.54 μm emission of erbium implanted into SiO2…”
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15
Nonuniform-channel MOS device
Published in Applied physics. A, Materials science & processing (01-05-2003)“…This paper presents a novel technology of lateral profile engineering addressing nonuniform-channel MOS devices. For the first time MOS devices with highly…”
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Excitation of Er3+ ions in silicon dioxide films thermally grown on silicon
Published in Applied physics letters (16-11-1998)“…We investigate photoluminescence (PL) and photoluminescence excitation spectroscopy of Er3+ ions implanted into SiO2 films thermally grown on silicon wafers…”
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17
Luminescence enhancement by hydrogenation of Si:Er,O
Published in Physica. E, Low-dimensional systems & nanostructures (01-03-2003)“…Erbium (Er)- and oxygen (O)-doped Cz–Si was additionally doped with hydrogen, using plasma enhanced chemical vapour deposition. Photoluminescence (PL) spectra…”
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Oxygen and hydrogen accumulation at buried implantation-damage layers in hydrogen- and helium-implanted Czochralski silicon
Published in Applied physics. A, Materials science & processing (01-03-2001)“…Oxygen and hydrogen accumulations at buried implantation-damage layers were studied after post-implant-ation annealing of hydrogen- and helium-implanted…”
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19
Ion bombardment of C 60: Raman study of amorphization and polymerization
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-03-1995)“…C 60 fullerite films on Si substrates have been bombarded with H, He, C and Ar ions with energies between 60 and 600 keV and doses ranging from 1 × 10 12 to 5…”
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Comparison of shallow depth profiles of cobalt-implanted Si wafers determined by total reflection x-ray fluorescence analysis after repeated stratified etching and by rutherford backscattering spectrometry
Published in Surface and interface analysis (01-11-1999)“…Thin and shallow layers of some 50–150 nm were produced by ion implantation of Co ions in Si wafers and afterwards characterized by concentration–depth…”
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