Search Results - "Oshio, R"

  • Showing 1 - 5 results of 5
Refine Results
  1. 1
  2. 2
  3. 3
  4. 4

    Development of ammonia adsorption filter and its application to LSI manufacturing environment by SAIKI, A, OSHIO, R, SUZUKI, M, TANAKA, A, ITOGA, T, YAMANAKA, R

    “…Activated carbon treated with a hydrogen salt is found to be effective in suppressing ammonia concentration in LSI cleanrooms. The hydrogen salt which contains…”
    Get full text
    Journal Article
  5. 5