Search Results - "Opsal, Jon"

Detection of thermal waves through optical reflectance by ROSENCWAIG, A, OPSAL, J, SMITH, W. L, WILLENBERG, D. L

“…We show that thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical…”
Get full text

Thermal and plasma wave depth profiling in silicon by OPSAL, J, ROSENCWAIG, A

“…We describe a depth-profiling concept using the critically damped plasma wave corresponding to the propagation of the free-carrier plasma density generated by…”
Get full text

Beam profile reflectometry : a new technique for dielectric film measurements by ROSENCWAIG, A, OPSAL, J, WILLENBORG, D. L, KELSO, S. M, FANTON, J. T

“…We describe a new technique for measuring the thickness and optical constants of dielectric, semiconducting, and thin metal films. Beam profile reflectometry…”
Get full text

Electron-Phonon Mass Enhancement in Thermoelectricity by Opsal, Jon L., Thaler, Barry J., Bass, Jack

Get full text

EXPERIMENTAL AND THEORETICAL STUDIES IN LOW-TEMPERATURE PHYSICS: SUBLIMATION AND VAPOR PRESSURE OF ARGON-36 AND THE COMBINED EFFECTS OF PHONON ATTENUATION AND IMPEDANCE MATCHING ON KAPITZA RESISTANCE by OPSAL, JON LYNN

Get full text

Thickness and Topography of Dielectric Dual-Sidewall Spacers on Metal Gate of DRAM Extracted by Spectroscopic Ellipsometry by Jun-Wei Gong, Yeh-Chang Fang, Ta-Yung Wang, Jia-Rui Hu, Chung-I Chang, Tings Wang, Shih-Jung Lee, Opsal, J., Nicolaides, L.

“…As the design rule of devices decreases with shrinking gate width dimensions, the properties of sidewall layers are becoming increasingly important for…”
Get full text

Thin-film thickness measurements with thermal waves by ROSENCWAIG, A, OPSAL, J, WILLENBORG, D. L

“…We have developed a method for measuring the thickness of thin films that is nondestructive, noncontact and that can make measurements with 2-μm spatial…”
Get full text

Comment on ‘‘Spatially resolved defect mapping in semiconductors using laser-modulated thermoreflectance’’ [Appl. Phys. Lett. 4 7 , 1336 (1985)] by Rosencwaig, Allan, Opsal, Jon, Smith, W. L., Willenborg, D. L.

Get full text

Thermal Wave Imaging with Thermoacoustic Detection by Rosencwaig, A., Opsal, J.

“…Thermoacoustic imaging is a new technique that permits the detection and imaging of microscopic surface and subsurface features in a sample. A detailed…”
Get full text

Nondestructive analysis of ultrashallow junction implant damage by combined technology of thermal wave and spectroscopic methods by Hovinen, Minna, Opsal, Jon

“…Boron and arsenic low-energy (200–5000 eV) implants are studied after implantation, prior to annealing. We present results of optical measurements that provide…”
Get full text

EXPERIMENTAL AND THEORETICAL STUDIES IN LOW-TEMPERATURE PHYSICS: SUBLIMATION AND VAPOR PRESSURE OF ARGON-36 AND THE COMBINED EFFECTS OF PHONON ATTENUATION AND IMPEDANCE MATCHING ON KAPITZA RESISTANCE by OPSAL, JON LYNN

Get full text

How far can one go with optical metrology? by Opsal, Jon

“…With the 0.01% precision that one can expect from a laser-based measurement system, a wide range of incident angles and multiple planes of incidence, it seems…”
Get full text

Imaging of flaws with tomographic processing of time domain ramp responses by Cook, Bill D., McKinney, R. L., Opsal, Jon

“…When a flaw (void or inclusion) is radiated with an ultrasonic pulse with the shape of a ramp, the backscattered echo contains information that is easily…”
Get full text

Sublimation and Vapor Pressure of Ar 36 by Opsal, Jon L., Leming, Charles W., Pollack, Gerald L.

Get full text

Improved calculations of Kapitza resistance: Combined effects of phonon attenuation and impedance matching on Kapitza resistance by Opsal, Jon L., Pollack, Gerald L.

Get full text

Thermal‐wave measurements and monitoring of TaSi x silicide film properties by Smith, W. Lee, Opsal, Jon, Rosencwaig, Allan, Stimmell, James B., Allison, Jane C., Bhandia, Aloke S.

“…There presently exists the need to measure the postanneal thickness of silicide films deposited on Si. In addition, there exists the need to monitor the…”
Get full text

Nonthermal laser-induced recrystallization of amorphous silicon by BAILEY, J, WEBER, E. R, OPSAL, J, ROSENSWAIG, A

Get full text

Temperature-dependent magnetoresistance of pure aluminum and dilute Al-Ga and Al-Mg alloys by Snodgrass, M. L., Blatt, F. J., Opsal, Jon L., Chiang, C. K.

Get full text