Search Results - "OlssonIII, R. H"

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  1. 1

    Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers by Olsson, Roy H., Wojciechowski, Kenneth E., Baker, Michael S., Tuck, Melanie R., Fleming, James G.

    Published in Journal of microelectromechanical systems (01-06-2009)
    “…This paper describes the development of aluminum nitride (AlN) resonant accelerometers that can be integrated directly over foundry CMOS circuitry…”
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    Journal Article
  2. 2

    Periodically Poled Aluminum Scandium Nitride Bulk Acoustic Wave Resonators and Filters for Communications in the 6G Era by Izhar, Fiagbenu, M. M. A, Yao, S, Du, X, Musavigharavi, P, Deng, Y, Leathersich, J, Moe, C, Kochhar, A, Stach, E. A, Vetury, R, OlssonIII, R. H

    Published 24-05-2024
    “…Bulk Acoustic Wave (BAW) filters find applications in radio frequency (RF) communication systems for Wi-Fi, 3G, 4G, and 5G networks. In the beyond-5G…”
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    Journal Article