Search Results - "OlssonIII, R. H"
-
1
Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers
Published in Journal of microelectromechanical systems (01-06-2009)“…This paper describes the development of aluminum nitride (AlN) resonant accelerometers that can be integrated directly over foundry CMOS circuitry…”
Get full text
Journal Article -
2
Periodically Poled Aluminum Scandium Nitride Bulk Acoustic Wave Resonators and Filters for Communications in the 6G Era
Published 24-05-2024“…Bulk Acoustic Wave (BAW) filters find applications in radio frequency (RF) communication systems for Wi-Fi, 3G, 4G, and 5G networks. In the beyond-5G…”
Get full text
Journal Article