Search Results - "Oliver, Andrew D"
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Bent-beam electrothermal actuators-Part II: Linear and rotary microengines
Published in Journal of microelectromechanical systems (01-06-2001)“…For Part I see L. Que, J.S. Park and Y.B. Gianchandani, ibid., vol.10, pp.247-54 (2001). This paper reports on the use of bent-beam electrothermal actuators…”
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Journal Article -
2
A 1024-element bulk-micromachined thermopile infrared imaging array
Published in Sensors and actuators. A. Physical. (30-03-1999)“…This paper reports on a bulk-micromachined silicon uncooled thermal imager intended for use in automated semiconductor process control. The device has a…”
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Journal Article -
3
MEMS Back-Scanning Mirrors for Step-Stare Scanning for Chirped Pulse Coherent LIDAR
Published in 2021 IEEE Research and Applications of Photonics in Defense Conference (RAPID) (01-08-2021)“…We are investigating the design and demonstration of a back scanning correction mirror for use in coherent LiDAR. Our aim is a mirror with a resonant frequency…”
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Conference Proceeding -
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Lifetime studies of electrothermal bent-beam actuators in single-crystal silicon and polysilicon
Published in Journal of microelectromechanical systems (01-06-2006)“…Microsystems using electrothermal bent-beam microactuators have been demonstrated for a variety of applications including optical attenuators, RF switches, and…”
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Journal Article -
5
Photothermal surface-micromachined actuators
Published in IEEE transactions on electron devices (01-04-2003)“…We report on the optical actuation of surface micromachines. Optical energy is absorbed by the micromachines and converted to heat, which causes differential…”
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Journal Article -
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Bent-beam electrothermal actuators. II - Linear and rotary microengines
Published in Journal of microelectromechanical systems (01-06-2001)“…This paper reports on the use of bent-beam electrothermal actuators for the purpose of generating rotary and long-throw rectilinear displacements. The rotary…”
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Journal Article -
7
Pulse and DC operation lifetimes of bent-beam electrothermal actuators
Published in Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) (2001)“…This paper reports on lifetime studies of polysilicon and p/sup ++/ Si electrothermal actuators designed for rectilinear displacements. Measurements show that…”
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Conference Proceeding