Search Results - "Olivares, Jimena"
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Dual-Mode Solidly Mounted Resonator-Based Sensor for Temperature and Humidity Detection and Discrimination
Published in Sensors (Basel, Switzerland) (01-05-2024)“…Sensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low…”
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Journal Article -
2
Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films
Published in Materials (08-03-2023)“…This work presents a study on the homogeneity and thermal stability of Al0.7Sc0.3N films sputtered from Al-Sc segmented targets. The films are sputtered on Si…”
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3
Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors
Published in Beilstein journal of nanotechnology (2019)“…We present the successful growth of few-layer graphene on top of AlN-based solidly mounted resonators (SMR) using a low-temperature chemical vapour deposition…”
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4
Growth of carbon nanotube forests on metallic thin films
Published in Carbon (New York) (01-08-2015)“…Growing carbon nanotube (CNT) forests on metals for integrated circuits interconnections or active layers applications is currently a challenge. CNT forests…”
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5
Carbon nanotube forests as top electrode in electroacoustic resonators
Published in Applied physics letters (28-09-2015)“…We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators…”
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6
Effects of Post-Deposition Vacuum Annealing on the Piezoelectric Properties of AlScN Thin Films Sputtered on 200 Mm Production Wafers
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01-10-2018)“…Sc-doped AIN polycrystalline films are attractive active layers for high frequency (GHz range)acoustic resonators owing to the significant rise in the material…”
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Conference Proceeding -
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Assessment of the Absolute Mass Attachment to an AlN-based Solidly Mounted Resonator Using a Single Shear Mode
Published in IEEE electron device letters (01-04-2020)“…We prove the ability of a gravimetric sensor consisting in an AlN-based solidly mounted resonator (SMR) operating in the shear mode to decouple mass detection…”
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Journal Article -
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Influence of liquid properties on the performance of S0‐mode Lamb wave sensors II: Experimental validation
Published in Sensors and actuators. B, Chemical (28-06-2016)“…•We state a FEA model predicting the in-liquid sensing mechanisms of S0 Lamb wave resonators (S0-LWR).•We experimentally validate the theoretical model.•S0-LWR…”
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Journal Article -
9
Homogeneity and Thermal Stability of Sputtered Al 0.7 Sc 0.3 N Thin Films
Published in Materials (08-03-2023)“…This work presents a study on the homogeneity and thermal stability of Al Sc N films sputtered from Al-Sc segmented targets. The films are sputtered on Si…”
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Journal Article -
10
Homogeneity and Thermal Stability of Sputtered Al[sub.0.7]Sc[sub.0.3]N Thin Films
Published in Materials (01-03-2023)“…This work presents a study on the homogeneity and thermal stability of Al[sub.0.7]Sc[sub.0.3]N films sputtered from Al-Sc segmented targets. The films are…”
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Journal Article -
11
Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator
Published in Sensors and actuators. B, Chemical (01-02-2017)“…We investigate the performance of solidly mounted resonators based on Ir/tilted-AlN/Ir piezoelectric stacks as biosensors. These films are deposited by varying…”
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Journal Article -
12
Influence of liquid properties on the performance of S 0 ‐mode Lamb wave sensors II: Experimental validation
Published in Sensors and actuators. B, Chemical (28-06-2016)“…Electro-acoustic sensors proving an adequate operation in liquid media are appropriate candidates for biosensing or liquid monitoring applications. In this…”
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13
Selection of aptamers to Neisseria meningitidis and Streptococcus pneumoniae surface specific proteins and affinity assay using thin film AlN resonators
Published in Sensors and actuators. B, Chemical (01-07-2017)“…[Display omitted] •SOMAmers selection against surface specific protein PavA from Streptococcus pneumoniae.•SOMAmers selection against surface specific protein…”
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14
Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
Published in 2012 IEEE International Ultrasonics Symposium (01-10-2012)“…In this work we present the assessment of the structural and piezoelectric properties of Al (0.5-x) Ti x N 0.5 compounds (titanium content <;6% atomic), which…”
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Conference Proceeding -
15
Gravimetric biosensor based on a 1.3GHz AlN shear-mode solidly mounted resonator
Published in Sensors and actuators. B, Chemical (01-02-2017)“…We investigate the performance of solidly mounted resonators based on Ir/tilted-AlN/Ir piezoelectric stacks as biosensors. These films are deposited by varying…”
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Journal Article -
16
Piezoelectric and electroacoustic properties of V-doped and Ta-doped AlN thin films
Published in 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) (01-07-2013)“…In this paper we analyze the effects of doping AlN films with vanadium and tantalum to concentrations up to 6% atomic. The structure and composition of the new…”
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Conference Proceeding -
17
Tungsten Oxide Layers of High Acoustic Impedance for Fully Insulating Acoustic Reflectors
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01-07-2016)“…Gravimetric sensors based on solidly mounted resonators require fully insulating acoustic reflectors to avoid parasitics when operating in liquid media. In…”
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18
Influence of crystal quality on the excitation and propagation of surface and bulk acoustic waves in polycrystalline AlN films
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01-01-2012)“…We investigate the excitation and propagation of acoustic waves in polycrystalline aluminum nitride films along the directions parallel and normal to the…”
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Journal Article -
19
High-acoustic-impedance tantalum oxide layers for insulating acoustic reflectors
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01-03-2012)“…This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors…”
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Journal Article Conference Proceeding -
20
Integration of Graphene on AlN Based High Frequency Resonators and Their Functionalization for Biosensing
Published in Proceedings (01-08-2017)“…We present the successful integration of graphene on top of AlN-based solidly mounted resonators (SMRs), using a low temperature CVD process and Ni layers as…”
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