Search Results - "Okholin, P.N."
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Plasma treatment as a versatile tool for tuning of sorption properties of thin nanoporous carbon films
Published in Applied surface science (01-04-2021)“…[Display omitted] •Functionalization of nanoporous carbon films through plasma treatment is proposed.•Hydrophilicity of graphitic surface grows significantly…”
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RF plasma treatment of shallow ion-implanted layers of germanium
Published in Materials science in semiconductor processing (01-02-2016)“…RF plasma annealing (RFPA) and rapid thermal annealing (RTA) of high-dose implanted n-type and p-type amorphized Ge layers have been studied by Raman…”
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Study of the processes of carbonization and oxidation of porous silicon by Raman and IR spectroscopy
Published in Semiconductors (Woodbury, N.Y.) (01-03-2011)“…Porous silicon layers were produced by electrochemical etching of single-crystal silicon wafers with the resistivity 10 Ω cm in the aqueous-alcohol solution of…”
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