Search Results - "Ohtsu, Yasunori"

Temporal evolution of the ion flux to the target in rotational RF multimagnetron plasma by Ohtsu, Yasunori, Yasuda, Koya, Schulze, Julian

“…Rotational multimagnetron plasmas driven by radio-frequency power are designed by taking into account the electronic gyro-radius and Hall parameter. Temporal…”
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Development of a cruciform radio-frequency closed magnetron sputtering source including four sectorial magnetron sputtering discharges for uniform target utilization by Yasuda, Koya, Ohtsu, Yasunori, Schulze, Julian

“…A rotational cruciform radio frequency magnetron source has been developed by including four sectorial magnetron sputtering discharges for uniform target…”
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Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization by Ohtsu, Yasunori, Nakashima, Takahiro, Tanaka, Rei, Schulze, Julian

“…A rotational windmill-shaped radio frequency magnetron plasma source has been developed for improving the target utilization rate. Two kinds of magnet…”
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Atmospheric-pressure plasma jet system for silicon etching without fluorocarbon gas feed by Ohtsu, Yasunori, Nagamatsu, Kenta

“…We developed an atmospheric-pressure plasma jet (APPJ) system with a tungsten rod electrode coated with C2F4 particles of approximately 0.3 µm diameter for the…”
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Preparation of Water-Repellent Film on a Plastic Plate by Unbalanced Radio-Frequency Magnetron Plasma Sputtering Using PTFE Target for a Next-Generation Automobile Window by Ohtsu, Yasunori, Ino, Yuta, Fujio, Yuki, Tabaru, Tatsuo, Yasunaga, Takeshi, Ikegami, Yasuyuki

“…A plastic plate made of polycarbonate (PC) was functionalized as a water-repellent nature by unbalanced radio-frequency(rf) magnetron plasma sputtering using…”
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Properties of AZO thin films prepared by stationary and rotating RF magnetized plasma sputtering source by Hossain, Md. Amzad, Patwary, Md Abdul Majed, Rahman, Md. Mustafizur, Ohtsu, Yasunori

“…The aluminum-doped zinc oxide (AZO) films were deposited with a star-shaped plasma using a high-density radio frequency (RF) magnetized sputtering source to…”
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Outer Ring-Shaped Radio Frequency Magnetized Plasma Source for Target Utilization in Specific Area by Hossain, Md Amzad, Ohtsu, Yasunori

“…A capacitively coupled radio frequency outer ring-shaped magnetized plasma discharge has been proposed with a concentrically monopole arrangement of magnets to…”
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Spatial structure of radio frequency ring-shaped magnetized discharge sputtering plasma using two facing ZnO/Al2O3 cylindrical targets for Al-doped ZnO thin film preparation by Sumiyama, Takashi, Fukumoto, Takaya, Ohtsu, Yasunori, Tabaru, Tatsuo

“…Spatial structure of high-density radio frequency ring-shaped magnetized discharge plasma sputtering with two facing ZnO/Al2O3 cylindrical targets mounted in…”
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Rotational cross-shaped magnetized radio-frequency sputtering plasma source for uniform circular target utilization by Ide, Tsubasa, Hossain, Md. Amzad, Nakamura, Yutaro, Ohtsu, Yasunori

“…A rotational cross-shaped magnetized radio-frequency (RF) sputtering plasma source was developed for uniform circular target utilization. The cross-shaped…”
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Treatment of a polycarbonate plate for a next-generation vehicle window by radio frequency magnetron plasma sputtering using a PVDF target by Ohtsu, Yasunori, Takada, Yusuke, Sugawara, Kosei, Fujio, Yuki, Tabaru, Tatsuo

“…A polycarbonate (PC) plate was treated by a radio frequency magnetron sputtering process using a polyvinylidene difluoride target for a next-generation vehicle…”
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Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials Processing by Hossain, Md. Amzad, Ohtsu, Yasunori, Tabaru, Tatsuo

“…We proposed a gyratory square-shaped capacitive radio-frequency discharge plasma sputtering source for materials processing and functional film preparation,…”
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Production of radio frequency magnetron plasma by monopole arrangement of magnets for target uniform utilization by Ohtsu, Yasunori, Shigyo, Masakazu, Akiyama, Morito, Tabaru, Tatsuo

“…The monopole magnet arrangement under sputtering target has been proposed to improve target utilization in radio frequency magnetron plasma. Magnetic field…”
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Radio-frequency magnetized ring-shaped hollow cathode discharge plasma for low-pressure plasma processing by Ohtsu, Yasunori, Eguchi, Junta, Yahata, Yoshiki

“…Influence of magnetic field configuration on ring-shaped hollow cathode discharge has been investigated in order to perform high-density plasma sources under a…”
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Production of High-Density Radio-Frequency Plasma Source by Ring-Shaped Hollow-Cathode Discharge at Various Trench Shapes by Ohtsu, Yasunori, Yahata, Yoshiki, Kagami, Johji, Kawashimo, Yasushi, Takeuchi, Tatsuya

“…High-density radio-frequency (RF) plasma sources have been produced by ring-shaped hollow-cathode discharge at various trench shapes. The influence of…”
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Observation of internal pulsed current flow through the ZnO specimen in the spark plasma sintering method by Misawa, Tatsuya, Shikatani, Noboru, Kawakami, Yuji, Enjoji, Takashi, Ohtsu, Yasunori, Fujita, Hiroharu

“…In spark plasma sintering (SPS), it is supposed that a part of the large pulsed sintering current flows into the specimen and affects the sintering behavior…”
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Production of Low Electron Temperature Plasma and Coating of Carbon-Related Water-Repellent Films on Plastic Plate by Ohtsu, Y., Kihara, K.

“…Low electron temperature plasma with a value less than 2 eV was produced by the inductively coupled discharge with a three-turn spiral antenna and the…”
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Observation of ring-shaped pulsed DC discharge plasma source using single pole magnet setups for material processing by Hossain, Md. Amzad, Patwary, M. A. Majed, Bhuiyan, M. M. Rahman, Nakamura, Yutaro, Sugawara, Kosei, Ohtsu, Yasunori

“…A pulsed direct current (DC) discharge ring-shaped plasma source has been proposed using single pole magnet arrangements, including a center magnet, with…”
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Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide by Ohtsu, Yasunori, Fujita, Hiroharu

“…High-density capacitively coupled radio-frequency plasma with electron density n e > 10 10 cm − 3 was produced using MgO electrodes with a high…”
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Spatial behavior of the plasma potential in a magnetized radio-frequency discharge from emissive probe data by POPESCU, Sebastian, OHTSU, Yasunori, FUJITA, Hiroharu

“…The spatial profiles of the plasma potential at the crest and the trough phases of the oscillating radio-frequency field in an inductively coupled plasma, in…”
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Competing Inactivation Agents for Bacterial Spores in Radio-Frequency Oxygen Plasmas by Vicoveanu, Dragos, Popescu, Sebastian, Ohtsu, Yasunori, Fujita, Hiroharu

“…The inactivation of Bacillus subtilis spores in a low pressure RF oxygen plasma was studied. The experiments were especially designed to discriminate the…”
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