Search Results - "Ohmura, Etsuji"
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1
Influence of thermal expansion coefficient in laser scribing of glass
Published in Precision engineering (2010)“…Aluminosilicate glass, which has a relatively low thermal expansion coefficient, is used as a glass substrate in liquid crystal displays, whereas soda-lime…”
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Journal Article -
2
Three-dimensional thermal stress analysis on laser scribing of glass
Published in Precision engineering (01-10-2008)“…In the laser scribing of glass a thermal stress is introduced into a glass plate by means of CO 2 laser irradiation. The glass plate is rapidly cooled down by…”
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Journal Article -
3
Influence of glass substrate thickness in laser scribing of glass
Published in Precision engineering (2010)“…The thickness of the glass substrate used in liquid crystal displays continues to be decreased from its original thickness of 1.1 mm for the purpose reducing…”
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4
Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer
Published in Journal of advanced mechanical design, systems, and manufacturing (01-01-2008)“…In this study, "stealth dicing" (SD) was applied to ultra thin wafers 50 μm in thickness. A coupling problem composed of focused laser propagation in single…”
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5
Femtosecond laser fabrication of microspike-arrays on tungsten surface
Published in Applied surface science (15-07-2005)“…Microspike-arrays were fabricated by irradiating a femtosecond laser on a tungsten surface through a mask opening in air. The natural logarithms of the…”
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Journal Article Conference Proceeding -
6
Thermally stabilized photoinduced Bragg gratings
Published in Applied physics letters (23-09-2002)“…Bragg gratings were printed in Ge–SiO2 and Ge–B–SiO2 thin glass films by KrF excimer laser irradiation through a phase mask. The diffraction efficiency of the…”
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7
Femtosecond laser quenching of the ε phase of iron
Published in Applied physics letters (27-10-2003)“…The quenching of the ε phase of iron, which has not been observed under a conventional shock compression, was attained using a femtosecond laser. The…”
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Journal Article -
8
Femtosecond laser driven shock synthesis of the high-pressure phase of iron
Published in Applied surface science (15-07-2005)“…The synthesis of the high-pressure ɛ phase of iron was attained using a femtosecond laser. The crystalline structure in a recovered iron sample was determined…”
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Journal Article Conference Proceeding -
9
Laser processing of doped silicon wafer by the Stealth Dicing
Published in 2007 International Symposium on Semiconductor Manufacturing (01-10-2007)“…Stealth dicing has outstanding advantages over conventional dicing methods such as blade dicing and laser ablation method. Therefore, stealth dicing is being…”
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Conference Proceeding -
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Advanced dicing technology for semiconductor wafer -Stealth Dicing
Published in 2006 IEEE International Symposium on Semiconductor Manufacturing (01-09-2006)“…"Stealth Dicing (SD) " was developed to solve such inherent problems of dicing process as debris contaminants and unnecessary thermal damage on work wafer. In…”
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Conference Proceeding