Search Results - "Ohlidal, Miloslav"
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Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films
Published in Optics express (23-11-2020)“…The method of variable angle spectroscopic ellipsometry usable for the complete optical characterization of inhomogeneous thin films exhibiting complicated…”
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2
Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data
Published in Optik (Stuttgart) (01-06-2023)“…Two samples of silicon-single crystal substrates with randomly rough surfaces covered by native oxide layers are investigated by means of angle-resolved…”
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3
Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry
Published in Applied surface science (30-12-2020)“…[Display omitted] •Thickness non-uniform films are studied by variable-angle spectroscopic ellipsometry.•The shapes of non-uniformity are modeled using a…”
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Influence of technological conditions on mechanical stresses inside diamond-like carbon films
Published in Diamond and related materials (01-11-2005)“…In this paper the influences of the technological conditions, i.e. the influences of the hydrogen flow rate and deposition time, on the values of the intrinsic…”
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Journal Article Conference Proceeding -
5
Stable a-CSi:H films with a wide range of modulus of elasticity and low internal stress
Published in Surface & coatings technology (25-04-2023)“…Amorphous hydrogenated silicon carbide (a-CSi:H) thin films were deposited by plasma-enhanced chemical vapor deposition using tetravinylsilane as organosilicon…”
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Application of imaging spectroscopic reflectometry for characterization of gold reduction from organometallic compound by means of plasma jet technology
Published in Applied surface science (28-02-2017)“…[Display omitted] •Metallic gold is reduced from an organometallic compound layer using a plasma jet.•Imaging spectroscopic reflectometry is used to locate…”
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7
Simultaneous determination of dispersion model parameters and local thickness of thin films by imaging spectrophotometry
Published in Applied surface science (30-09-2015)“…[Display omitted] •Imaging spectroscopic reflectometry data processing method is developed.•Local film thicknesses in each pixel and shared optical constants…”
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Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry
Published in Thin solid films (28-11-2014)“…Standard variable-angle spectroscopic ellipsometry, mapping spectroscopic ellipsometry with microspot and imaging spectroscopic reflectometry are applied to…”
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Journal Article Conference Proceeding -
9
Optical characterisation of SiOxCyHz thin films non-uniform in thickness using spectroscopic ellipsometry, spectroscopic reflectometry and spectroscopic imaging reflectometry
Published in Thin solid films (28-02-2011)“…The combined optical method enabling us to perform the complete optical characterisation of weakly absorbing non-uniform thin films is described. This method…”
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Journal Article Conference Proceeding -
10
Rough surface scattering simulations using graphics cards
Published in Applied surface science (01-07-2010)“…In this article we present results of rough surface scattering calculations using a graphical processing unit implementation of the Finite Difference in Time…”
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Journal Article Conference Proceeding -
11
Experimental analysis of irregularities of metallic surfaces generated by abrasive waterjet
Published in International journal of machine tools & manufacture (01-09-2007)“…Experimental study of the surface quality produced by abrasive waterjet (AWJ) on metallic materials has been performed. The surface roughness/waviness was…”
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Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films
Published in Diamond and related materials (01-04-2007)“…The aim of the present contribution is the study of the influence of the annealing on the mechanical and optical properties of the plasma deposited…”
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Journal Article Conference Proceeding -
13
Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films
Published in Diamond and related materials (01-02-2009)“…Complete optical characterization of diamond-like carbon (DLC) films non-uniform in thickness is performed using spectroscopic imaging reflectometry (SIR). It…”
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Journal Article Conference Proceeding -
14
Measurement of optical parameters of thin films non-uniform in thickness
Published in 29th Conference on Precision Electromagnetic Measurements (CPEM 2014) (01-08-2014)“…A multi-pixel modification of the data fitting procedure for imaging spectroscopic reflectometry is used for the optical characterisation of thin films…”
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Conference Proceeding Journal Article -
15
Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
Published in Diamond and related materials (01-04-2008)“…Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity…”
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Journal Article Conference Proceeding -
16
Optical characterisation of SiO x C y H z thin films non-uniform in thickness using spectroscopic ellipsometry, spectroscopic reflectometry and spectroscopic imaging reflectometry
Published in Thin solid films (28-02-2011)“…The combined optical method enabling us to perform the complete optical characterisation of weakly absorbing non-uniform thin films is described. This method…”
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17
Complete Optical Characterization of Non-Uniform SiOx Thin Films Using Imaging Spectroscopic Reflectometry
Published in E-journal of surface science and nanotechnology (01-01-2009)“…Complete optical characterization of SiOx films non-uniform in thickness is performed using imaging spectroscopic reflectometry. It is shown that by using this…”
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18
Digital laser speckle spectral correlation within the framework of the fresnel approximation of the scalar kirchhoff theory and its application in surface roughness measurement
Published in Journal of modern optics (01-09-2003)“…Correlation of laser speckle fields generated by light of two different wavelengths, which illuminates successively a randomly rough surface, is solved…”
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19
New Method for the Complete Optical Analysis of Thin Films Nonuniform in Optical Parameters
Published in Japanese Journal of Applied Physics (2003)Get full text
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20
SPECTRAL ANALYSIS OF METALLIC SURFACES TOPOGRAPHY GENERATED BY ABRASIVE WATERJET
Published in Tehnički vjesnik (01-03-2012)“…A basic study of a surface topography generated by an abrasive waterjet cutting is performed by means of the spectral analysis of these surfaces. The initial…”
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