Search Results - "Ogawa, Etsuji"

A <100 PPB/K Frequency-Matching Temperature Stability MEMS Rate Integrating Gyroscope Enabled by Donut-Mass Structure by Kaji, Shiori, Gando, Ryunosuke, Masunishi, Kei, Ogawa, Etsuji, Miyazaki, Fumito, Hiraga, Hiroki, Tomizawa, Yasushi, Shibata, Hideki

“…This paper experimentally demonstrates a donut-mass gyroscope (DMG) with the highest frequency-matching temperature stability reported to date for a MEMS rate…”
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A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement by Gando, Ryunosuke, Maeda, Shunta, Masunishi, Kei, Tomizawa, Yasushi, Ogawa, Etsuji, Hatakeyama, Yohei, Itakura, Tetsuro, Ikehashi, Tamio

“…We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the…”
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Initial Investigation of Physically Tightly-Coupled Single-Chip MEMS IMU for Mutual Compensation of Two Differential Resonant Accelerometers and a Mode-Matched Donut-Mass Gyroscope by Miyazaki, Fumito, Ono, Daiki, Ogawa, Jumpei, Tomioka, Tazuko, Masunishi, Kei, Uchida, Kengo, Murase, Hideaki, Ogawa, Etsuji, Ishibashi, Fumitaka, Tomizawa, Yasushi

“…In this study, we report an initial study on mutual compensation between a differential resonant accelerometer (DRA) and a donut-mass gyroscope (DMG)…”
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Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes by Masunishi, Kei, Ogawa, Etsuji, Ono, Daiki, Miyazaki, Fumito, Uchida, Kengo, Ogawa, Jumpei, Murase, Hideaki, Ishibashi, Fumitaka, Tomizawa, Yasushi

“…This paper presents a wide-dynamic-range (DR) MEMS differential resonant accelerometer (DRA). Conventional MEMS DRAs have a structure in which T-shaped…”
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CMOS-embedded high-power handling RF-MEMS tunable capacitor using quadruple series capacitor and slit with dielectric bridges structure by Yamazaki, Hiroaki, Kurui, Yoshihiko, Saito, Tomohiro, Ogawa, Etsuji, Obara, Kei, Gando, Ryunosuke, Ono, Daiki, Ikehashi, Tamio

“…In this paper, we report on a high-power handling RF-MEMS tunable capacitor that has a quadruple series capacitor (QSC) and a movable electrode using a slit…”
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A creep-immune electrostatic actuator for RF-MEMS tunable capacitor by Ogawa, Etsuji, Ikehashi, Tamio, Saito, Tomohiro, Yamazaki, Hiroaki, Masunishi, Kei, Tomizawa, Yasushi, Ohguro, Tatsuya, Sugizaki, Yoshiaki, Toyoshima, Yoshiaki, Shibata, Hideki

“…A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring…”
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An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors by Yamazaki, Hiroaki, Ikehashi, Tamio, Ohguro, Tatsuya, Ogawa, Etsuji, Kojima, Kenji, Ishimaru, Kazunari, Ishiuchi, Hidemi

“…We propose an intelligent bipolar actuation (IBA) method for electrostatic actuators, which can suppress stiction induced by dielectric charging. The high…”
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Highly reliable and manufacturable in-line wafer-level hermetic packages for RF MEMS variable capacitor by Kojima, A., Shimooka, Y., Sugizaki, Y., Endo, M., Yamazaki, H., Ogawa, E., Ikehashi, T., Ohguro, T., Obata, S., Miyagi, T., Mori, I., Toyoshima, Y., Shibata, H.

“…In this paper, we report a thin-film encapsulation technology for wafer-level microelectromechanical systems (MEMS) variable capacitor package. The electrical…”
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Demonstration of Multi-axis Sensitivity and Temperature Compensation for a Physically Tightly-Coupled MEMS IMU Integrating a Mode-Matched Gyroscope and Two Differential Resonant Accelerometers by Miyazaki, Fumito, Tomioka, Tazuko, Ogawa, Jumpei, Ono, Daiki, Masunishi, Kei, Uchida, Kengo, Murase, Hideaki, Ogawa, Etsuji, Ishibashi, Fumitaka, Tomizawa, Yasushi

“…This paper demonstrates multi-axis sensitivity and temperature compensation for angular velocity, acceleration, and temperature for a mode-matched gyroscope…”
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A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure by Yamazaki, Hiroaki, Ikehashi, Tamio, Saito, Tomohiro, Ogawa, Etsuji, Masunaga, Takayuki, Ohguro, Tatsuya, Sugizaki, Yoshiaki, Shibata, Hideki

“…This paper presents an RF MEMS tunable capacitor that achieves an excellent power-handling property with relatively low actuation voltage. The tunable…”
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Demonstration of Wide Dynamic Range Measurement of a Microcontroller-Based Mems Gyro Module by Fusing The Outputs of Two Different Operation Modes by Tomizawa, Yasushi, Miyazaki, Fumito, Ono, Daiki, Murase, Hideaki, Ogawa, Jumpei, Tomioka, Tazuko, Masunishi, Kei, Ogawa, Etsuji, Ishibashi, Fumitaka, Uchida, Kengo

“…Gyroscopes for positioning and attitude measurement of drones, self-driving vehicles, and other mobility devices are required to be compact and highly…”
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A 0.1 DEG/H Module-Level Silicon Mems Rate Integrating Gyroscope Using Virtually Rotated Donut-Mass Structure and Demonstration of the Earth's Rotation Detection by Miyazaki, Fumito, Gando, Ryunosuke, Ono, Daiki, Kaji, Shiori, Ota, Hiroshi, Hiraga, Hiroki, Masunishi, Kei, Ogawa, Etsuji, Itakura, Tetsuro, Tomizawa, Yasushi

“…This paper presents the first silicon MEMS rate integrating gyroscope (RIG) module capable of detecting the Earth's rotation directly in angle output. The new…”
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Demonstration of Gyro-Less North Finding Using a T-Shaped MEMS Differential Resonant Accelerometer by Masunishi, Kei, Ogawa, Etsuji, Ono, Daiki, Miyazaki, Fumito, Hiraga, Hiroki, Uchida, Kengo, Ogawa, Jumpei, Murase, Hideaki, Tomizawa, Yasushi

“…In this paper, we demonstrate the detection of true north by rotating a T-Shaped MEMS differential resonant accelerometer (DRA) at a constant angular velocity…”
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A T-Shaped Mems Differential Resonant Accelerometer with Module-Base Demonstration of >134 Db Dynamic Range and <1 Mdeg Absolute Tilt Angle Precision by Masunishi, Kei, Ogawa, Etsuji, Gando, Ryunosuke, Ono, Daiki, Kaji, Shiori, Miyazaki, Fumito, Hiraga, Hiroki, Uchida, Kenga, Tomizawa, Yasushi

“…This paper presents a MEMS differential resonant accelerometer (DRA) in a compact module (5 cm × 5 cm × 1 cvm), The module integrates an analog board with a…”
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A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure by Yamazaki, H., Ikehashi, T., Saito, T., Ogawa, E., Masunaga, T., Ohguro, T., Sugizaki, Y., Shibata, H.

“…This paper presents an RF MEMS tunable capacitor that achieves excellent power-handling property with relatively low actuation voltage. The tunable capacitor…”
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An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation by Ikehashi, Tamio, Miyazaki, Takayuki, Yamazaki, Hiroaki, Suzuki, Atsushi, Ogawa, Etsuji, Miyano, Shinji, Saito, Tomohiro, Ohguro, Tatsuya, Miyagi, Takeshi, Sugizaki, Yoshiaki, Otsuka, Nobuaki, Shibata, Hideki, Toyoshima, Yoshiaki

“…We propose an IBA scheme based on a pull-out detection, which is suitable for implementing in a circuit. The scheme is implemented in a driver IC that is part…”
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A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications by Yuzawa, Akiko, Gando, Ryunosuke, Masunishi, Kei, Ogawa, Etsuji, Hiraga, Hiroki, Tomizawa, Yasushi, Itakura, Tetsuro, Ikehashi, Tamio

“…This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a "Catch-and-Release (CR)" method. While CR enables…”
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A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching by Gando, Ryunosuke, Kubo, Haruka, Masunishi, Kei, Tomizawa, Yasushi, Ogawa, Etsuji, Maeda, Shunta, Hatakeyama, Yohei, Itakura, Tetsuro, Ikehashi, Tamio

“…This paper presents a novel MEMS gyroscope that employs intermittent free vibration and mode matching. An intermittent operation is realized by a…”
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An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications by Gando, Ryunosuke, Kubo, Haruka, Tomizawa, Yasushi, Ogawa, Etsuji, Maeda, Shunta, Masunishi, Kei, Hatakeyama, Yohei, Itakura, Tetsuro, Ikehashi, Tamio

“…This paper presents the first intermittent free-vibration MEMS gyroscope enabled by a "Catch-and-Release (CR)" drive mechanism, which realizes substantial…”
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A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor by Ogawa, E., Masunishi, K., Ikehashi, T., Saito, T., Yamazaki, H., Tomizawa, Y., Sugizaki, Y.

“…Actuators used in RF-MEMS tunable capacitors have an issue of creep-induced deformation. The creep is caused by a ductile-metal beam which is indispensable to…”
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