Search Results - "OKINO, O"
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Two-dimensional nanowire array formation on Si substrate using self-organized nanoholes of anodically oxidized aluminum
Published in Solid-state electronics (01-06-1999)“…A highly ordered two-dimensional array of 48 nm Cu wires was successfully fabricated on Si substrate by the usage of anodic oxidation of aluminum (Al) for the…”
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Journal Article -
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Ordered two-dimensional nanowire array formation using self-organized nanoholes of anodically oxidized aluminum
Published in Japanese Journal of Applied Physics (01-12-1997)“…Self-organization of a two-dimensional array of nanoholes which were formed by anodic oxidation of aluminum was investigated quantitatively using fast Fourier…”
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Conference Proceeding Journal Article -
3
Fabrication of nanohole array on Si using self-organized porous alumina mask
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-09-2001)“…Formation of the ordered array of nanoholes on Si was investigated by the use of the self-organized porous alumina nanoholes array etching mask that is…”
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Journal Article -
4
Fabrication of nano holes array on Si substrate using anodically oxidized aluminum etching mask
Published in Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference (1999)“…The present study aims at the pattern transfer of nano hole array of alumina to Si semiconductor single crystalline substrates for wide applications to…”
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Conference Proceeding -
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Analysis of P and Sb diffusion during thermal oxidation in silicon
Published in Japanese Journal of Applied Physics (1994)“…Using experimental results of oxidation-enhanced/retarded diffusions (OED/ORD) for P/Sb in silicon, OED and ORD equations are rewritten into differential…”
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Journal Article