E-beam re-aligned HBTs and a new broadband MMIC power amplifier using bathtub as heat sink
A benchmark X-band AlGaAs-GaAs HBT MMIC power amplifier with 7 W output power, 14 dB gain and greater than 50% efficiency has been fabricated using a base-to-emitter re-aligned approach based on an electron-beam, direct-write technique. A novel flipside bathtub and metallization technology provides...
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Published in: | Proceedings of 1994 IEEE International Electron Devices Meeting pp. 203 - 206 |
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Main Authors: | , , , , , |
Format: | Conference Proceeding Journal Article |
Language: | English |
Published: |
IEEE
1994
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Subjects: | |
Online Access: | Get full text |
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Summary: | A benchmark X-band AlGaAs-GaAs HBT MMIC power amplifier with 7 W output power, 14 dB gain and greater than 50% efficiency has been fabricated using a base-to-emitter re-aligned approach based on an electron-beam, direct-write technique. A novel flipside bathtub and metallization technology provides a practical means to reduce the thermal resistance of HBT cells and greatly enhance the microwave power performance.< > |
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Bibliography: | SourceType-Scholarly Journals-2 ObjectType-Feature-2 ObjectType-Conference Paper-1 content type line 23 SourceType-Conference Papers & Proceedings-1 ObjectType-Article-3 |
ISBN: | 9780780321113 0780321111 |
ISSN: | 0163-1918 2156-017X |
DOI: | 10.1109/IEDM.1994.383430 |